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Ts'ebetso e Ikhethileng ea Al2O3 Ceramic Wafer Chuck
Dikarolo tse setseng tsa letsopa di bopilwe ka ho hatelloa ka tsela e batang le ho silwa ka tlasa mocheso o phahameng, ebe di ntshwa ka machining le ho bentshwa ka nepo, di ka fihlela ditlhoko tse tiileng tsa disebediswa tsa semiconductor ka dibopeho tsa tsona tsa ho hanyetsa ho tsofala, ho hanyetsa ho bola, katoloso e tlase ya mocheso, le ho kenya mochesong. Diserame di ka sebetsa mefuteng e mengata ya disebediswa tsa tlhahiso ya semiconductor tse nang le boemo ba mocheso o phahameng, kgase ya vacuum kapa e senyang nako e telele.
E entsoe ka phofo ea alumina e hloekileng haholo, e sebetsoang ka ho hatelloa ka mokhoa o batang oa isostatic, ho sintering mochesong o phahameng le ho qeta ka nepo, e ka fihlela mamello ea boholo ho fihlela ho ± 0.001 mm, qetello ea bokaholimo Ra 0.1, khanyetso ea mocheso 1600℃.
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Lisebelisoa tsa Semiconductor tse Ikhethileng tsa ST.CERA
Dikarolo tse setseng tsa letsopa di bopilwe ka ho hatelloa ka tsela e batang le ho silwa ka tlasa mocheso o phahameng, ebe di ntshwa ka machining le ho bentshwa ka nepo, di ka fihlela ditlhoko tse tiileng tsa disebediswa tsa semiconductor ka dibopeho tsa tsona tsa ho hanyetsa ho tsofala, ho hanyetsa ho bola, katoloso e tlase ya mocheso, le ho kenya mochesong. Diserame di ka sebetsa mefuteng e mengata ya disebediswa tsa tlhahiso ya semiconductor tse nang le boemo ba mocheso o phahameng, kgase ya vacuum kapa e senyang nako e telele.
E entsoe ka phofo ea alumina e hloekileng haholo, e sebetsoang ka ho hatelloa ka mokhoa o batang oa isostatic, ho sintering mochesong o phahameng le ho qeta ka nepo, e ka fihlela mamello ea boholo ho fihlela ho ± 0.001 mm, qetello ea bokaholimo Ra 0.1, khanyetso ea mocheso 1600℃.
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Sekoti sa Alumina sa Vacuum sa lisenthimithara tse 12 bakeng sa Ts'ebetso ea Wafer ea 300mm
Sekotwana sa vacuum sa St.Cera sa lisenthimithara tse 12 se entsoe ka nepo ho tsoa ho alumina ea 99.8% e hloekileng haholo (Al₂O₃) bakeng sa ho sebetsana le wafer ea 300mm. Sekotwana sena se na le bokaholimo bo kobehileng hantle (bophara ba groove 0.5–1.0 mm, bophahamo ba 2–3 mm) ho netefatsa kabo e lekanang ea vacuum ho pholletsa le bophara bohle ba 300mm. Bophara bo bolokoa ka har'a 5 μm, bo nolofalletsang ho tsitsisa wafer e se nang ho kobeha nakong ea ho seha, ho sila ka morao le ho hlahlojoa. Matla a phahameng a ho kobeha (361 MPa) le ho thatafala (16 GPa) tsa thepa li tiisa botsitso ba nako e telele esita le tlas'a potoloho ea vacuum e pheta-phetoang.
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Alumina Ceramic End Effector e nang le Likanale tse Kopaneng tsa Vacuum
Sesebelisoa sa ho qetela sa ho kenya li-alumina sa St.Cera se kopanya likanale tsa vacuum tse entsoeng ka mokhoa o nepahetseng le masoba a ho hula ka kotloloho 'meleng oa alumina oa 99.8%. Moralo ona o tlosa li-pads tsa vacuum tsa kantle, o nolofalletsa ho nka li-wafer ka kotloloho ka matla a ts'oanang a ho tšoara. Matla a phahameng a ho kobeha ha thepa (361 MPa) le ho thatafala (16 GPa) li netefatsa botsitso ba nako e telele tlas'a lipotoloho tse pheta-phetoang tsa vacuum. Ho ba bataletse ho pholletsa le sebaka sa pad ho bolokoa ka har'a 10 μm, ho thibela khatello ea wafer le ho robeha. Likou tsa vacuum li fumaneha ka morao ho flange bakeng sa ho hokela habonolo le matsoho a roboto ea OEM.
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Likarolo tsa Ceramic tsa Alumina tse Sireletsehileng tsa ESD bakeng sa ho Tšoara Wafer e sa Fetoheng
Likarolo tsa letsopa tse bolokehileng tsa alumina tsa St.Cera's ESD (electrostatic discharge) li entsoe ka 99.8% ea Al₂O₃ e hloekileng haholo ka resistivity e etselitsoeng bokaholimo ba 10⁶–10⁹ Ω/sq, e fihlellehang ka mokhoa oa doping kapa coating. Likarolo tsena li qhala ka katleho tjhaja e sa fetoheng, li thibela tšenyo ea electrostatic ho li-wafer le lisebelisoa tse bonolo tsa semiconductor. Thepa ea motheo e boloka matla a eona a phahameng a ho flexural (361 MPa), ho thatafala (16 GPa), le matla a dielectric (15×10⁶ V/m). Likarolo tsa letsopa tse bolokehileng tsa ESD li kenyelletsa li-end effectors, li-lift pin, li-guide rails, le lisebelisoa tse ikhethileng bakeng sa automation ea FAB.
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Likarolo tse ling tsa Ceramic bakeng sa Lisebelisoa tsa Semiconductor Probe
Dikarolo tse setseng tsa letsopa di bopilwe ka ho hatelloa ka tsela e batang le ho silwa ka tlasa mocheso o phahameng, ebe di ntshwa ka machining le ho bentshwa ka nepo, di ka fihlela ditlhoko tse tiileng tsa disebediswa tsa semiconductor ka dibopeho tsa tsona tsa ho hanyetsa ho tsofala, ho hanyetsa ho bola, katoloso e tlase ya mocheso, le ho kenya mochesong. Diserame di ka sebetsa mefuteng e mengata ya disebediswa tsa tlhahiso ya semiconductor tse nang le boemo ba mocheso o phahameng, kgase ya vacuum kapa e senyang nako e telele.
E entsoe ka phofo ea alumina e hloekileng haholo, e sebetsoang ka ho hatelloa ka mokhoa o batang oa isostatic, ho sintering mochesong o phahameng le ho qeta ka nepo, e ka fihlela mamello ea boholo ho fihlela ho ± 0.001 mm, qetello ea bokaholimo Ra 0.1, khanyetso ea mocheso 1600℃.
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Sekepe sa Lisebelisoa tsa Semiconductor sa Ceramic Plate
Dikarolo tse setseng tsa letsopa di bopilwe ka ho hatelloa ka tsela e batang le ho silwa ka tlasa mocheso o phahameng, ebe di ntshwa ka machining le ho bentshwa ka nepo, di ka fihlela ditlhoko tse tiileng tsa disebediswa tsa semiconductor ka dibopeho tsa tsona tsa ho hanyetsa ho tsofala, ho hanyetsa ho bola, katoloso e tlase ya mocheso, le ho kenya mochesong. Diserame di ka sebetsa mefuteng e mengata ya disebediswa tsa tlhahiso ya semiconductor tse nang le boemo ba mocheso o phahameng, kgase ya vacuum kapa e senyang nako e telele.
E entsoe ka phofo ea alumina e hloekileng haholo, e sebetsoang ka ho hatelloa ka mokhoa o batang oa isostatic, ho sintering mochesong o phahameng le ho qeta ka nepo, e ka fihlela mamello ea boholo ho fihlela ho ± 0.001 mm, qetello ea bokaholimo Ra 0.1, khanyetso ea mocheso 1600℃.
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Lisebelisoa tsa Semiconductor Likarolo tsa Ceramic Spare
Dikarolo tse setseng tsa letsopa di bopilwe ka ho hatelloa ka tsela e batang le ho silwa ka tlasa mocheso o phahameng, ebe di ntshwa ka machining le ho bentshwa ka nepo, di ka fihlela ditlhoko tse tiileng tsa disebediswa tsa semiconductor ka dibopeho tsa tsona tsa ho hanyetsa ho tsofala, ho hanyetsa ho bola, katoloso e tlase ya mocheso, le ho kenya mochesong. Diserame di ka sebetsa mefuteng e mengata ya disebediswa tsa tlhahiso ya semiconductor tse nang le boemo ba mocheso o phahameng, kgase ya vacuum kapa e senyang nako e telele.
E entsoe ka phofo ea alumina e hloekileng haholo, e sebetsoang ka ho hatelloa ka mokhoa o batang oa isostatic, ho sintering mochesong o phahameng le ho qeta ka nepo, e ka fihlela mamello ea boholo ho fihlela ho ± 0.001 mm, qetello ea bokaholimo Ra 0.1, khanyetso ea mocheso 1600℃.
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Lesale la Tiiso la Alumina Ceramic le Hloekileng ka ho Fetisisa bakeng sa ho Tiisoa ha Kamore ea Mocheso o Phahameng
Lesale la tiiso la St.Cera la ceramic le entsoe e le mokhoa o mong oa ho sebelisa masale a polymer O libakeng tse feteletseng moo li-elastomer li senyehang. Le entsoe ka alumina ea 99.8% e hloekileng haholo (Al₂O₃), lesale lena la tiiso le tiileng le sebelisoa lits'ebetsong tsa ho tiisa tse sa fetoheng - hangata le kopantsoe le gasket ea tšepe e bonolo kapa ea graphite - ho fana ka tšireletso e tšepahalang ea vacuum kapa khase mochesong o fihlang ho 800°C le libakeng tse mabifi tsa plasma kapa tsa lik'hemik'hale. Thepa ena ha e na khase e tsoang, matla a phahameng a khatello (matla a tlase a ho flexural 361 MPa), le ho se sebetse hantle ha lik'hemik'hale (ho hanela li-halogen, li-acid le li-alkali ntle le HF). Libaka tsa ho tiisa tse nang le mahlakore a nepahetseng (bophara ≤5 μm, bohlasoa ba bokaholimo Ra ≤0.2 μm) li netefatsa hore ho kopana ha tšepe kapa likarolo tsa ceramic hoa dutla.
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Lesale la ho Tsepamisa la Kamore ea Alumina e Hloekileng ka ho Fetisisa bakeng sa Litsamaiso tsa Plasma Etch le CVD
Lesale la ho tsepamisa maikutlo la kamore ea St.Cera ke karolo ea bohlokoa ea sesebelisoa sa ts'ebetso e sebelisoang lisebelisoa tsa semiconductor tsa plasma etch, CVD, le PVD. E entsoe ka alumina ea 99.8% e hloekileng haholo (Al₂O₃), lesale le potoloha lehlakore la wafer ho thibela plasma le ho ntlafatsa kabo ea ion angular, ka hona le ntlafatsa ho tšoana ha etch holim'a bokaholimo ba wafer. Thepa e fana ka khanyetso e ikhethang ea plasma, matla a phahameng a dielectric (15×10⁶ V/m), le botsitso ba mocheso ho fihlela ho 1600°C, ho netefatsa ts'epo ea nako e telele libakeng tsa plasma tse matla tse thehiloeng ho fluorine kapa chlorine. ID/OD e sitsitsoeng hantle le ho ba bataletse (≤10 μm) li nolofalletsa ho beha moeli oa wafer hantle, ho fokotsa liphoso tsa moeli le tlhahiso ea likaroloana.
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Lesale la Ceramic la Alumina le Hloekileng ka ho Fetisisa bakeng sa Likamore tsa Ts'ebetso ea CVD / PVD
Lesale la letsopa la St.Cera le etselitsoe ka ho khetheha ho sebelisoa likamoreng tsa ts'ebetso tsa CVD (Chemical Vapor Deposition) le PVD (Physical Vapor Deposition). Lesale lena le entsoe ka 99.8% alumina e hloekileng haholo (Al₂O₃), lesale lena le sebetsa e le karolo ea kamore, lesale la ho tsepamisa mohopolo, kapa karolo ea kit ea ts'ebetso ho thibela plasma le ho sireletsa mabota a kamore hore a se ke a khoholeha. Thepa ena e fana ka khanyetso e ntle ea plasma, matla a phahameng a dielectric (15×10⁶ V/m), le botsitso ba mocheso ho fihlela ho 1600°C, ho netefatsa bophelo bo bolelele ba ts'ebeletso libakeng tse matla tsa plasma tse thehiloeng ho fluorine. Mamello e nepahetseng ea litekanyo (± 0.05 mm ho ID/OD) le ho ba sephara (≤10 μm) li nolofalletsa ho beha moeli oa wafer ka mokhoa o tsitsitseng, ho ntlafatsa ho ts'oana ha deposition le ho fokotsa tlhahiso ea likaroloana.
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Bernoulli Ceramic End Effector — Ho Sebetsana le Wafer e sa Kopaneng le e Senyehileng bakeng sa Wafer e Nyenyane le e Fokolang Hantle
Sesebediswa sa ho qetela sa ceramic sa St.Cera's Bernoulli se sebedisa aerodynamic lift ho sebetsana le di-wafer ntle le ho ama mmele. Se entswe ka alumina ya 99.8% e hlwekileng haholo (Al₂O₃) kapa silicon carbide (SiC), se na le di-nozzle tse entsweng ka nepo tse ntshang kgase e hatelletsoeng ho etsa filimi e tshesane ya moya pakeng tsa sesebediswa sa ho qetela le wafer. Molao-motheo ona wa ho se ame o fedisa tshilafatso ya lehlakore le ka morao, ho qhaqha ha lehlakore, le tshenyo ya bokahodimo, e leng se etsang hore e be e loketseng di-wafer tse tshesane (≤100 μm), tse pshatlehang habonolo, kapa tse sothehileng. Substrate ya ceramic e fana ka matla a ho thiba a phahameng (361 MPa bakeng sa Al₂O₃; ho fihlela ho 550–600 MPa bakeng sa SiC), boima bo tlase, le botsitso bo botle ba sebopeho, ho netefatsa hore ho ka phetwa sebaka dirobotong tsa phetisetso ya wafer tse lebelo le hodimo.
