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Li-disc tsa Alumina Ceramic tse nang le Bohloeki bo Phahameng
Dikarolo tse setseng tsa letsopa di bopilwe ka ho hatelloa ka tsela e batang le ho silwa ka tlasa mocheso o phahameng, ebe di ntshwa ka machining le ho bentshwa ka nepo, di ka fihlela ditlhoko tse tiileng tsa disebediswa tsa semiconductor ka dibopeho tsa tsona tsa ho hanyetsa ho tsofala, ho hanyetsa ho bola, katoloso e tlase ya mocheso, le ho kenya mochesong. Diserame di ka sebetsa mefuteng e mengata ya disebediswa tsa tlhahiso ya semiconductor tse nang le boemo ba mocheso o phahameng, kgase ya vacuum kapa e senyang nako e telele.
E entsoe ka phofo ea alumina e hloekileng haholo, e sebetsoang ka ho hatelloa ka mokhoa o batang oa isostatic, ho sintering mochesong o phahameng le ho qeta ka nepo, e ka fihlela mamello ea boholo ho fihlela ho ± 0.001 mm, qetello ea bokaholimo Ra 0.1, khanyetso ea mocheso 1600℃.
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letsoho la ceramic la alumina
Dikarolo tse setseng tsa letsopa di bopilwe ka ho hatelloa ka tsela e batang le ho silwa ka tlasa mocheso o phahameng, ebe di ntshwa ka machining le ho bentshwa ka nepo, di ka fihlela ditlhoko tse tiileng tsa disebediswa tsa semiconductor ka dibopeho tsa tsona tsa ho hanyetsa ho tsofala, ho hanyetsa ho bola, katoloso e tlase ya mocheso, le ho kenya mochesong. Diserame di ka sebetsa mefuteng e mengata ya disebediswa tsa tlhahiso ya semiconductor tse nang le boemo ba mocheso o phahameng, kgase ya vacuum kapa e senyang nako e telele.
E entsoe ka phofo ea alumina e hloekileng haholo, e sebetsoang ka ho hatelloa ka mokhoa o batang oa isostatic, ho sintering mochesong o phahameng le ho qeta ka nepo, e ka fihlela mamello ea boholo ho fihlela ho ± 0.001 mm, qetello ea bokaholimo Ra 0.1, khanyetso ea mocheso 1600℃.
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Masale a ho Sireletsa a Ceramic Masale a ho Tsepamisa Maikutlo a Ceramic
Dikarolo tse setseng tsa letsopa di bopilwe ka ho hatelloa ka tsela e batang le ho silwa ka tlasa mocheso o phahameng, ebe di ntshwa ka machining le ho bentshwa ka nepo, di ka fihlela ditlhoko tse tiileng tsa disebediswa tsa semiconductor ka dibopeho tsa tsona tsa ho hanyetsa ho tsofala, ho hanyetsa ho bola, katoloso e tlase ya mocheso, le ho kenya mochesong. Diserame di ka sebetsa mefuteng e mengata ya disebediswa tsa tlhahiso ya semiconductor tse nang le boemo ba mocheso o phahameng, kgase ya vacuum kapa e senyang nako e telele.
E entsoe ka phofo ea alumina e hloekileng haholo, e sebetsoang ka ho hatelloa ka mokhoa o batang oa isostatic, ho sintering mochesong o phahameng le ho qeta ka nepo, e ka fihlela mamello ea boholo ho fihlela ho ± 0.001 mm, qetello ea bokaholimo Ra 0.1, khanyetso ea mocheso 1600℃.
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Tšireletso ea Lesale la ho Sireletsa la ST.CERA Alumina Ceramic Clamp
Dikarolo tse setseng tsa letsopa di bopilwe ka ho hatelloa ka tsela e batang le ho silwa ka tlasa mocheso o phahameng, ebe di ntshwa ka machining le ho bentshwa ka nepo, di ka fihlela ditlhoko tse tiileng tsa disebediswa tsa semiconductor ka dibopeho tsa tsona tsa ho hanyetsa ho tsofala, ho hanyetsa ho bola, katoloso e tlase ya mocheso, le ho kenya mochesong. Diserame di ka sebetsa mefuteng e mengata ya disebediswa tsa tlhahiso ya semiconductor tse nang le boemo ba mocheso o phahameng, kgase ya vacuum kapa e senyang nako e telele.
E entsoe ka phofo ea alumina e hloekileng haholo, e sebetsoang ka ho hatelloa ka mokhoa o batang oa isostatic, ho sintering mochesong o phahameng le ho qeta ka nepo, e ka fihlela mamello ea boholo ho fihlela ho ± 0.001 mm, qetello ea bokaholimo Ra 0.1, khanyetso ea mocheso 1600℃.
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Letsoho la Roboto ea Alumina Ceramic e Hloekileng ka ho Fetisisa bakeng sa ho Tšoara Wafer
Letsoho la roboto la alumina la St.Cera le entsoe ka nepo ho tsoa ho 99.8% Al₂O₃ (alumina) e hloekileng haholo. Le kopanya matla a ikhethang a ho kokomoha (361 MPa), ho thatafala ho hoholo (16 GPa), le ho ba le boima bo tlase (3.93 g/cm³), e leng se etsang hore letsoho le be bobebe empa le tiile bakeng sa phetiso ea wafer ea semiconductor. Coefficient ea katoloso ea mocheso ea thepa (7.2×10⁻⁶/°C) e ts'oana le silicon haufi-ufi, e fokotsa ho se lumellane ha mocheso nakong ea ts'ebetso.
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Likarolo tsa Ceramic tsa Alumina tse Hloahloa tse Nepahetseng ka ho Fetisisa
Dikarolo tse setseng tsa letsopa di bopilwe ka ho hatelloa ka tsela e batang le ho silwa ka tlasa mocheso o phahameng, ebe di ntshwa ka machining le ho bentshwa ka nepo, di ka fihlela ditlhoko tse tiileng tsa disebediswa tsa semiconductor ka dibopeho tsa tsona tsa ho hanyetsa ho tsofala, ho hanyetsa ho bola, katoloso e tlase ya mocheso, le ho kenya mochesong. Diserame di ka sebetsa mefuteng e mengata ya disebediswa tsa tlhahiso ya semiconductor tse nang le boemo ba mocheso o phahameng, kgase ya vacuum kapa e senyang nako e telele.
E entsoe ka phofo ea alumina e hloekileng haholo, e sebetsoang ka ho hatelloa ka mokhoa o batang oa isostatic, ho sintering mochesong o phahameng le ho qeta ka nepo, e ka fihlela mamello ea boholo ho fihlela ho ± 0.001 mm, qetello ea bokaholimo Ra 0.1, khanyetso ea mocheso 1600℃.
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Lisebelisoa tsa Semiconductor tse Ikhethileng tsa ST.CERA
Dikarolo tse setseng tsa letsopa di bopilwe ka ho hatelloa ka tsela e batang le ho silwa ka tlasa mocheso o phahameng, ebe di ntshwa ka machining le ho bentshwa ka nepo, di ka fihlela ditlhoko tse tiileng tsa disebediswa tsa semiconductor ka dibopeho tsa tsona tsa ho hanyetsa ho tsofala, ho hanyetsa ho bola, katoloso e tlase ya mocheso, le ho kenya mochesong. Diserame di ka sebetsa mefuteng e mengata ya disebediswa tsa tlhahiso ya semiconductor tse nang le boemo ba mocheso o phahameng, kgase ya vacuum kapa e senyang nako e telele.
E entsoe ka phofo ea alumina e hloekileng haholo, e sebetsoang ka ho hatelloa ka mokhoa o batang oa isostatic, ho sintering mochesong o phahameng le ho qeta ka nepo, e ka fihlela mamello ea boholo ho fihlela ho ± 0.001 mm, qetello ea bokaholimo Ra 0.1, khanyetso ea mocheso 1600℃.
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Silicon Carbide (SiC) Ceramic End Effector – Ho Tiea ho Hoholo bakeng sa ho Sebetsana le Wafer ka Mocheso o Phahameng
Sephetho sa ceramic sa St.Cera's SiC se entsoe ka silicon carbide e hloekileng haholo (kahare ho SiC 99.72%, Si e lokolohileng 0.05%) ho sebelisoa thepa ea sehlopha sa S1111. E fana ka thepa e ikhethang ea mechini: matla a ho flexural 449 MPa (e lekantsoe), modulus ea elastic 457 GPa (e lekantsoe), le thatafalo ea Vickers 25–28 GPa (e tloaelehileng). Botenya bo tlase (3.10–3.15 g/cm³, e tloaelehileng) bo fana ka ho tiea ho hoholo ho khethehileng, ho loketseng liroboto tsa phetisetso ea wafer tse lebelo le phahameng. Ka conductivity ea mocheso ea 120–150 W/m·K (e tloaelehileng) le coefficient ea katoloso ea mocheso ea 4.0–4.5×10⁻⁶/℃ (e tloaelehileng), sephetho sena se felisa mocheso ka katleho 'me se boloka botsitso ba litekanyo nakong ea ts'ebetso ea mocheso o phahameng (ho fihlela ho 1600–1700°C, ha ho mojaro). 'Mala o motšo/o moputsoa le ho monngoa ha metsi ho lefela li netefatsa hore kamore e hloekile e lumellana.
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Setlolo sa Vacuum se Thehiloeng ho Silicon Carbide (SiC) bakeng sa Tikoloho tse Mocheso o Phahameng le Plasma
Sekotwana sa letsopa se thehiloeng ho St.Cera's SiC se entsoe ka silicon carbide e hloekileng haholo (batch S1111, SiC 99.72%, Si e lokolohileng 0.05%). E fana ka matla a ho kokobela a lekantsoeng a 449 MPa, ho tiea ha ho robeha ha 3.12 MPa·m¹/², le modulus ea elastic ea 457 GPa. Ho tsamaisa mocheso ho tloaelehileng ha thepa (120–150 W/m·K) le katoloso e tlase ea mocheso (4.0–4.5×10⁻⁶/℃) ho nolofalletsa ho potlaka ha mocheso le ho warpage e fokolang ea wafer nakong ea potoloho ea mocheso. Sekotwana se ka hlophisoa e le sekotwana sa vacuum se nang le masoba (phallo ea khase e tšoanang) kapa sekotwana se tloaelehileng se nang le moalo. Ka mocheso o phahameng ka ho fetisisa oa tšebeliso oa 1600–1700°C (ha ho mojaro) le ho hanyetsa khoholeho ea plasma ka mokhoa o ikhethang, sekotwana sena se loketse ho sebetsa ka sekotwana sa wafer mochesong o phahameng (ho annealing, RTP) le likamore tsa etch tse mabifi moo li-chuck tsa alumina li senyehang.
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Lisebelisoa tsa Semiconductor Likarolo tsa Ceramic Spare Carriers
Dikarolo tse setseng tsa letsopa di bopilwe ka ho hatelloa ka tsela e batang le ho silwa ka tlasa mocheso o phahameng, ebe di ntshwa ka machining le ho bentshwa ka nepo, di ka fihlela ditlhoko tse tiileng tsa disebediswa tsa semiconductor ka dibopeho tsa tsona tsa ho hanyetsa ho tsofala, ho hanyetsa ho bola, katoloso e tlase ya mocheso, le ho kenya mochesong. Diserame di ka sebetsa mefuteng e mengata ya disebediswa tsa tlhahiso ya semiconductor tse nang le boemo ba mocheso o phahameng, kgase ya vacuum kapa e senyang nako e telele.
E entsoe ka phofo ea alumina e hloekileng haholo, e sebetsoang ka ho hatelloa ka mokhoa o batang oa isostatic, ho sintering mochesong o phahameng le ho qeta ka nepo, e ka fihlela mamello ea boholo ho fihlela ho ± 0.001 mm, qetello ea bokaholimo Ra 0.1, khanyetso ea mocheso 1600℃.
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Lesale la ho Sila la Alumina Ceramic le Tšepe le Tšepe bakeng sa Likopo tsa ho Lapa ka Matla a Phahameng
Lesale la ho sila la alumina le thehiloeng tšepeng la St.Cera le kopanya lera la ho roala la alumina le hloekileng haholo (99.8% Al₂O₃) le nang le tšehetso ea tšepe e entsoeng ka mochini o nepahetseng (hangata aluminium kapa tšepe e sa ruseng). Moralo ona o kopantsoeng o fana ka khanyetso e ikhethang ea ho roala le ho se sebetse hantle ha ceramic holim'a metsi a silang, ha motheo oa tšepe o eketsa matla a mechini, ho kenya habonolo, le ho hanyetsa ho robeha ha brittle. Lera la alumina le fana ka matla a ho kobeha a 361 MPa, ho thatafala ha Vickers ha 16 GPa, le botsitso ba mocheso ho fihlela ho 800°C. Motheo oa tšepe o etselitsoe ka masoba a ho kenya, ho fumana li-pin, kapa thepa ea makenete bakeng sa ho kopanngoa le mechini ea ho lapa, li-grinder tsa polanete le lisebelisoa tsa CMP.
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Likarolo tsa Ceramic bakeng sa Lisebelisoa tsa Seteishene sa Probe sa Semiconductor
Dikarolo tse setseng tsa letsopa di bopilwe ka ho hatelloa ka tsela e batang le ho silwa ka tlasa mocheso o phahameng, ebe di ntshwa ka machining le ho bentshwa ka nepo, di ka fihlela ditlhoko tse tiileng tsa disebediswa tsa semiconductor ka dibopeho tsa tsona tsa ho hanyetsa ho tsofala, ho hanyetsa ho bola, katoloso e tlase ya mocheso, le ho kenya mochesong. Diserame di ka sebetsa mefuteng e mengata ya disebediswa tsa tlhahiso ya semiconductor tse nang le boemo ba mocheso o phahameng, kgase ya vacuum kapa e senyang nako e telele.
E entsoe ka phofo ea alumina e hloekileng haholo, e sebetsoang ka ho hatelloa ka mokhoa o batang oa isostatic, ho sintering mochesong o phahameng le ho qeta ka nepo, e ka fihlela mamello ea boholo ho fihlela ho ± 0.001 mm, qetello ea bokaholimo Ra 0.1, khanyetso ea mocheso 1600℃.
