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Alumina Ceramic discs nrog High Purity
Tsim los ntawm kev nias txias isostatic thiab sintered nyob rau hauv qhov kub siab, tom qab ntawd precision machined thiab polished, cov khoom seem ceramic tuaj yeem ua tau raws li txhua qhov kev cai nruj ntawm cov khoom siv semiconductor nrog nws cov yam ntxwv ntawm kev hnav tsis kam, corrosion tsis kam, thermal nthuav dav tsawg, thiab rwb thaiv tsev. Ceramics tuaj yeem ua haujlwm hauv ntau hom khoom siv semiconductor nrog qhov kub siab, nqus tsev lossis roj corrosive rau lub sijhawm ntev.
Ua los ntawm cov hmoov alumina purity siab, ua tiav los ntawm kev nias txias isostatic, sintering kub siab thiab ua tiav qhov tseeb, nws tuaj yeem ncav cuag qhov ntev kam rau ± 0.001 hli, qhov chaw tiav Ra 0.1, kub tsis kam 1600 ℃.
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alumina ceramic caj npab
Tsim los ntawm kev nias txias isostatic thiab sintered nyob rau hauv qhov kub siab, tom qab ntawd precision machined thiab polished, cov khoom seem ceramic tuaj yeem ua tau raws li txhua qhov kev cai nruj ntawm cov khoom siv semiconductor nrog nws cov yam ntxwv ntawm kev hnav tsis kam, corrosion tsis kam, thermal nthuav dav tsawg, thiab rwb thaiv tsev. Ceramics tuaj yeem ua haujlwm hauv ntau hom khoom siv semiconductor nrog qhov kub siab, nqus tsev lossis roj corrosive rau lub sijhawm ntev.
Ua los ntawm cov hmoov alumina purity siab, ua tiav los ntawm kev nias txias isostatic, sintering kub siab thiab ua tiav qhov tseeb, nws tuaj yeem ncav cuag qhov ntev kam rau ± 0.001 hli, qhov chaw tiav Ra 0.1, kub tsis kam 1600 ℃.
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Cov Nplhaib Rwb Thaiv Tsev Ua Los Ntawm Cov Khoom Siv Ceramic
Tsim los ntawm kev nias txias isostatic thiab sintered nyob rau hauv qhov kub siab, tom qab ntawd precision machined thiab polished, cov khoom seem ceramic tuaj yeem ua tau raws li txhua qhov kev cai nruj ntawm cov khoom siv semiconductor nrog nws cov yam ntxwv ntawm kev hnav tsis kam, corrosion tsis kam, thermal nthuav dav tsawg, thiab rwb thaiv tsev. Ceramics tuaj yeem ua haujlwm hauv ntau hom khoom siv semiconductor nrog qhov kub siab, nqus tsev lossis roj corrosive rau lub sijhawm ntev.
Ua los ntawm cov hmoov alumina purity siab, ua tiav los ntawm kev nias txias isostatic, sintering kub siab thiab ua tiav qhov tseeb, nws tuaj yeem ncav cuag qhov ntev kam rau ± 0.001 hli, qhov chaw tiav Ra 0.1, kub tsis kam 1600 ℃.
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ST.CERA Alumina Ceramic Clamp Ring Kev Tiv Thaiv Kev Rwb Thaiv Tsev
Tsim los ntawm kev nias txias isostatic thiab sintered nyob rau hauv qhov kub siab, tom qab ntawd precision machined thiab polished, cov khoom seem ceramic tuaj yeem ua tau raws li txhua qhov kev cai nruj ntawm cov khoom siv semiconductor nrog nws cov yam ntxwv ntawm kev hnav tsis kam, corrosion tsis kam, thermal nthuav dav tsawg, thiab rwb thaiv tsev. Ceramics tuaj yeem ua haujlwm hauv ntau hom khoom siv semiconductor nrog qhov kub siab, nqus tsev lossis roj corrosive rau lub sijhawm ntev.
Ua los ntawm cov hmoov alumina purity siab, ua tiav los ntawm kev nias txias isostatic, sintering kub siab thiab ua tiav qhov tseeb, nws tuaj yeem ncav cuag qhov ntev kam rau ± 0.001 hli, qhov chaw tiav Ra 0.1, kub tsis kam 1600 ℃.
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Caj Npab Hlau Ua Los Ntawm Alumina Uas Muaj Peev Xwm Siab Rau Kev Ua Tes Haujlwm Wafer
St.Cera lub caj npab neeg hlau alumina ceramic yog ua los ntawm 99.8% Al₂O₃ uas muaj qhov huv siab. Nws muaj lub zog khoov tau zoo heev (361 MPa), qhov nyuaj siab (16 GPa), thiab qhov ceev qis (3.93 g/cm³), ua rau lub caj npab sib dua tab sis khov kho rau kev hloov pauv semiconductor wafer. Cov coefficient ntawm thermal expansion ntawm cov khoom (7.2 × 10⁻⁶/°C) phim silicon ze heev, txo qhov tsis sib xws ntawm thermal thaum ua tiav.
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Alumina High-Precision Ceramic Ring Ceramic Parts
Tsim los ntawm kev nias txias isostatic thiab sintered nyob rau hauv qhov kub siab, tom qab ntawd precision machined thiab polished, cov khoom seem ceramic tuaj yeem ua tau raws li txhua qhov kev cai nruj ntawm cov khoom siv semiconductor nrog nws cov yam ntxwv ntawm kev hnav tsis kam, corrosion tsis kam, thermal nthuav dav tsawg, thiab rwb thaiv tsev. Ceramics tuaj yeem ua haujlwm hauv ntau hom khoom siv semiconductor nrog qhov kub siab, nqus tsev lossis roj corrosive rau lub sijhawm ntev.
Ua los ntawm cov hmoov alumina purity siab, ua tiav los ntawm kev nias txias isostatic, sintering kub siab thiab ua tiav qhov tseeb, nws tuaj yeem ncav cuag qhov ntev kam rau ± 0.001 hli, qhov chaw tiav Ra 0.1, kub tsis kam 1600 ℃.
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ST.CERA Cov Khoom Siv Semiconductor Uas Kho Kom Haum Rau Cov Khoom Siv Ceramic Chucks
Tsim los ntawm kev nias txias isostatic thiab sintered nyob rau hauv qhov kub siab, tom qab ntawd precision machined thiab polished, cov khoom seem ceramic tuaj yeem ua tau raws li txhua qhov kev cai nruj ntawm cov khoom siv semiconductor nrog nws cov yam ntxwv ntawm kev hnav tsis kam, corrosion tsis kam, thermal nthuav dav tsawg, thiab rwb thaiv tsev. Ceramics tuaj yeem ua haujlwm hauv ntau hom khoom siv semiconductor nrog qhov kub siab, nqus tsev lossis roj corrosive rau lub sijhawm ntev.
Ua los ntawm cov hmoov alumina purity siab, ua tiav los ntawm kev nias txias isostatic, sintering kub siab thiab ua tiav qhov tseeb, nws tuaj yeem ncav cuag qhov ntev kam rau ± 0.001 hli, qhov chaw tiav Ra 0.1, kub tsis kam 1600 ℃.
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Silicon Carbide (SiC) Ceramic End Effector - Kev Nyuaj Siab Rau Kev Tswj Xyuas Wafer Kub Siab
St.Cera's SiC ceramic end effector yog tsim los ntawm cov khoom siv silicon carbide siab (SiC cov ntsiab lus 99.72%, Si dawb 0.05%) siv cov khoom siv S1111. Nws muaj cov khoom siv kho tshuab zoo heev: lub zog flexural 449 MPa (ntsuas), elastic modulus 457 GPa (ntsuas), thiab Vickers hardness 25–28 GPa (feem ntau). Qhov ceev qis (3.10–3.15 g/cm³, feem ntau) muab qhov ruaj khov tshwj xeeb, zoo tagnrho rau cov neeg hlau hloov wafer ceev ceev. Nrog rau kev ua kom sov ntawm 120–150 W/m·K (feem ntau) thiab coefficient thermal expansion ntawm 4.0–4.5 × 10⁻⁶/℃ (feem ntau), qhov kawg effector no ua kom sov thiab tswj tau qhov ruaj khov thaum lub sijhawm ua haujlwm kub siab (txog li 1600–1700 ° C, tsis muaj kev thauj khoom). Xim dub/grey thiab xoom dej nqus tau ua kom chav huv si sib xws.
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Silicon Carbide (SiC) Raws Li Lub Tshuab Nqus Tsev Chuck rau Qhov Kub Siab & Plasma Ib puag ncig
St.Cera lub SiC-based ceramic chuck yog tsim los ntawm cov silicon carbide uas muaj purity siab (batch S1111, SiC 99.72%, Si dawb 0.05%). Nws muab lub zog flexural ntsuas ntawm 449 MPa, qhov tawg toughness ntawm 3.12 MPa·m¹/², thiab elastic modulus ntawm 457 GPa. Cov khoom siv thermal conductivity (120–150 W/m·K) thiab thermal expansion qis (4.0–4.5 × 10⁻⁶/℃) ua rau kub nce sai thiab tsawg kawg wafer warpage thaum lub sijhawm thermal cycling. Lub chuck tuaj yeem teeb tsa ua lub porous vacuum chuck (gas flow sib xws) lossis lub grooved standard chuck. Nrog rau qhov kub siv siab tshaj plaws ntawm 1600–1700°C (tsis muaj load) thiab kev tiv thaiv plasma erosion zoo heev, lub chuck no zoo tagnrho rau kev ua wafer kub siab (annealing, RTP) thiab cov etch chambers uas alumina chucks lwj.
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Cov Khoom Siv Semiconductor Cov Khoom Siv Ceramic Spare Parts Cov Khoom Siv Ceramic
Tsim los ntawm kev nias txias isostatic thiab sintered nyob rau hauv qhov kub siab, tom qab ntawd precision machined thiab polished, cov khoom seem ceramic tuaj yeem ua tau raws li txhua qhov kev cai nruj ntawm cov khoom siv semiconductor nrog nws cov yam ntxwv ntawm kev hnav tsis kam, corrosion tsis kam, thermal nthuav dav tsawg, thiab rwb thaiv tsev. Ceramics tuaj yeem ua haujlwm hauv ntau hom khoom siv semiconductor nrog qhov kub siab, nqus tsev lossis roj corrosive rau lub sijhawm ntev.
Ua los ntawm cov hmoov alumina purity siab, ua tiav los ntawm kev nias txias isostatic, sintering kub siab thiab ua tiav qhov tseeb, nws tuaj yeem ncav cuag qhov ntev kam rau ± 0.001 hli, qhov chaw tiav Ra 0.1, kub tsis kam 1600 ℃.
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Cov Nplhaib Sib Tsoo Uas Muaj Hlau Txhawb Nqa Alumina Ceramic Rau Kev Siv Lapping Rigidity Siab
St.Cera lub nplhaib sib tsoo alumina ua los ntawm hlau sib xyaw ua ke cov txheej txheem hnav ceramic alumina uas muaj qhov huv siab (99.8% Al₂O₃) nrog rau cov hlau thaub qab uas ua tiav (feem ntau yog txhuas lossis hlau tsis xeb). Qhov kev tsim sib xyaw no muab qhov kev tiv thaiv kev hnav thiab kev tsis muaj zog ntawm cov tshuaj ceramic ntawm qhov chaw sib tsoo, thaum lub hauv paus hlau ntxiv lub zog kho tshuab, yooj yim rau kev teeb tsa, thiab kev tiv thaiv kev tawg yooj yim. Cov txheej txheem alumina muab lub zog flexural ntawm 361 MPa, Vickers hardness ntawm 16 GPa, thiab kev ruaj khov thermal txog li 800 ° C. Lub hauv paus hlau tau hloov kho nrog cov qhov mounting, cov pins nrhiav, lossis cov khoom sib nqus rau kev koom ua ke rau hauv cov tshuab lapping, planetary grinders, thiab cov khoom siv CMP.
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Cov Khoom Siv Ceramic rau Cov Khoom Siv Semiconductor Probe Station
Tsim los ntawm kev nias txias isostatic thiab sintered nyob rau hauv qhov kub siab, tom qab ntawd precision machined thiab polished, cov khoom seem ceramic tuaj yeem ua tau raws li txhua qhov kev cai nruj ntawm cov khoom siv semiconductor nrog nws cov yam ntxwv ntawm kev hnav tsis kam, corrosion tsis kam, thermal nthuav dav tsawg, thiab rwb thaiv tsev. Ceramics tuaj yeem ua haujlwm hauv ntau hom khoom siv semiconductor nrog qhov kub siab, nqus tsev lossis roj corrosive rau lub sijhawm ntev.
Ua los ntawm cov hmoov alumina purity siab, ua tiav los ntawm kev nias txias isostatic, sintering kub siab thiab ua tiav qhov tseeb, nws tuaj yeem ncav cuag qhov ntev kam rau ± 0.001 hli, qhov chaw tiav Ra 0.1, kub tsis kam 1600 ℃.
