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Alumina PVD Rwb Thaiv Tsev Nplhaib rau Lub Cev Vapor Deposition Systems
St.Cera lub nplhaib rwb thaiv tsev PVD yog tsim los ntawm 99.8% alumina uas muaj purity siab (Al₂O₃) rau kev siv rau hauv cov txheej txheem tso pa tawm (PVD). Lub nplhaib muab kev sib cais hluav taws xob ntawm cov khoom hauv chav, tiv thaiv kev kub hnyiab thiab ua kom muaj kev ua haujlwm plasma ruaj khov. Cov yam ntxwv tseem ceeb suav nrog lub zog dielectric siab (15 × 10⁶ V / m), kev tiv thaiv tshwj xeeb >10¹⁴ Ω·mm² / m, thiab kev ruaj khov thermal txog li 1600 ° C. Peb lub peev xwm ua haujlwm precision ua tiav cov kab uas hla sab nraud txog li 600 hli, cov kab uas hla sab hauv mus txog 0.2 hli, qhov tiaj tiaj ntawm 0.003 hli, thiab qhov tiav ntawm qhov chaw Ra0.1. Lub nplhaib xoom porosity thiab tshuaj inertness ua kom ntseeg tau tias muaj kev ntseeg siab mus sij hawm ntev hauv cov chaw muaj kev sib txhuam hnyav.
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Alumina Ceramic Parts rau E-Phom Evaporation Systems
St.Cera tsim cov khoom siv ceramic uas muaj cov khoom huv siab 99.8% alumina uas tsim tshwj xeeb rau cov tshuab electron beam (E-gun) evaporation. Cov khoom no suav nrog crucible liners, beam deflector shields, insulators, thiab mounting fixtures. Cov khoom siv no muaj lub zog dielectric siab (15 × 10⁶ V/m), thermal stability txog li 1600°C, thiab zoo heev rau thermal shock thiab tshuaj lom neeg tawm tsam los ntawm cov khoom evaporated. Peb lub peev xwm ua haujlwm precision ua tiav cov geometries nyuaj nrog qhov tsawg kawg nkaus feature loj 0.2 hli, flatness 0.003 hli, thiab nto tiav Ra0.1. Txhua qhov yog 100% CMM tshuaj xyuas rau qhov tseeb ntawm qhov ntev.
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Phaj Alumina Ceramic Loj rau Semiconductor & Industrial Fixtures
St.Cera tsim cov phaj ceramic loj los ntawm 99.8% alumina ntshiab siab (Al₂O₃) nrog qhov ntev txog 1500mm thiab dav txog 600mm. Peb lub peev xwm sib tsoo precision ua tiav qhov tiaj tiaj ntawm 0.003mm dhau 100mm thiab parallelism ntawm 0.002mm, ua kom muaj qhov zoo sib xws rau cov ntawv thov loj. Thickness txog li 100mm, qhov tiav ntawm qhov chaw mus txog Ra0.1. Cov phaj no ua haujlwm ua lub hauv paus chuck nqus tsev, cov phaj cua sov, cov vaj huam sib luag rwb thaiv tsev hluav taws xob, thiab cov plag tsev ua haujlwm hauv semiconductor, zaub, thiab photovoltaic tsim. Muaj cov qhov hla, counterbores, thiab ntug profiling.
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Precision Alumina Ceramic Ring rau Sealing, Rwb Thaiv Tsev & Fixturing
Lub nplhaib ceramic ntawm St.Cera yog ua los ntawm 99.8% alumina uas muaj purity siab (Al₂O₃) rau cov ntawv thov uas xav tau kev tiv taus kev hnav siab, kev rwb thaiv hluav taws xob, thiab kev ruaj khov thermal txog li 1600°C. Peb lub peev xwm tsim khoom txhawb nqa cov kab uas hla sab nraud txog li 600mm, tuab txog li 100mm, thiab cov kab uas hla sab hauv me me li 0.2mm, nrog qhov tiaj tiaj ntawm 0.003mm, sib luag ntawm 0.002mm, thiab concentricity ntawm 0.01mm. Muaj nyob rau hauv cov nplhaib foob, cov nplhaib spacer, cov nplhaib khaws cia, lossis cov qauv profile tshwj xeeb. Cov khoom siv tsis muaj porosity thiab tshuaj inertness ua rau nws haum rau cov chaw muaj tshuaj lom neeg thiab plasma hnyav.
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Cov Raj Alumina Ceramic Uas Muaj Kev Ntshiab Siab Rau Qhov Kub Thiab Ib puag ncig Uas Muaj Kev Kub Ntxhov
Lub raj xa dej ua los ntawm St.Cera yog ua los ntawm 99.8% alumina uas muaj purity siab (Al₂O₃), muaj kev ruaj khov zoo heev txog li 1600°C, lub zog dielectric siab (15 × 10⁶ V/m), thiab tiv taus tshuaj lom neeg zoo dua. Peb lub peev xwm ua kom raug ua rau cov kab uas hla sab hauv me me li 0.2 hli, sab nraud me me txog li 600 hli, thiab ntev txog li 1500 hli, nrog kev ncaj ntawm 0.005 hli, concentricity ntawm 0.01 hli, thiab qhov tiav ntawm Ra0.1. Lub raj tsis muaj porosity (0% kev nqus dej) tiv thaiv kev tawm hauv qhov chaw nqus tsev, ua rau nws zoo tagnrho rau cov cub tawg semiconductor, kev tiv thaiv thermocouple, thiab kev ua tshuaj lom neeg. Cov phab ntsa tuab thiab qhov kawg kev teeb tsa (tiaj tus, tapered, flanged) muaj.
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Kev Cai Alumina Ceramic Parts rau Semiconductor & Industrial Equipment
St.Cera tsim cov khoom siv ceramic tshwj xeeb los ntawm 99.8% alumina uas muaj purity siab (Al₂O₃) raws li cov duab kos ntawm cov neeg siv khoom. Peb lub chaw muaj cov tshuab sib tsoo precision thiab CNC machining centers, ua rau muaj peev xwm tsim cov khoom siv ceramic nyuaj nrog kev ua haujlwm siab. Cov khoom ib txwm muaj xws li insulators, bearing balls, seal rings, bushings, custom fixtures, thiab complex geometries. Peb lub peev xwm tsim khoom txhawb nqa.
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Alumina Ceramic Nozzle rau Kev Txhaj Tshuaj Gas / Kua Kub Siab
Lub nozzle ua los ntawm St.Cera yog ua los ntawm cov khoom siv alumina uas muaj 99.8% purity siab (Al₂O₃), uas ua rau nws tsis yooj yim hnav (Vickers 16 GPa), tsis yooj yim rau tshuaj lom neeg nkag, thiab ruaj khov txog li 1600°C. Peb lub peev xwm ua kom raug thiab ua tau zoo heev, nws txoj kab uas hla sab hauv me li 0.2 hli, nrog rau qhov ncaj ntawm 0.005 hli thiab qhov sib npaug ntawm 0.01 hli, ua kom nws ntws tau zoo thiab faib tau cov kua/roj kom meej. Lub nozzle muaj lub qhov hauv du thiab tiaj tus nrog qhov tiav Ra0.1, ua kom nws tsis yooj yim ntws thiab txo qhov txhaws. Qhov loj ntawm qhov orifice yog txij li 0.2 hli mus txog 5.0 hli, nrog rau cov qauv geometries xws li qhov ncaj, tapered, lossis ntau qhov orifice outlets. Txhua lub nozzle raug tshuaj xyuas qhov ntev thiab kuaj xyuas seb nws ntws tau zoo li cas.
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Phaj Sib Tsoo Alumina Ceramic Uas Muaj Peev Xwm Siab Rau Kev Sib Tsoo Uas Muaj Kev Ntsuas Zoo
Lub phaj sib tsoo ceramic ntawm St.Cera yog tsim los ntawm 99.8% alumina uas muaj purity siab (Al₂O₃) rau kev siv lapping thiab kev sib tsoo kom raug. Peb lub peev xwm sib tsoo kom raug ua tiav qhov tiaj tiaj ntawm 0.003mm, parallelism ntawm 0.002mm, thiab qhov tiav ntawm Ra0.1, ua kom ntseeg tau tias cov khoom raug tshem tawm thoob plaws tag nrho cov phaj. Lub phaj muaj kev tiv thaiv kev hnav zoo heev (Vickers 16 GPa), lub zog flexural siab (361 MPa), thiab kev ruaj khov thermal txog li 800 ° C. Muaj nyob rau hauv cov qauv puag ncig txog li 600mm txoj kab uas hla thiab cov phaj rectangular txog li 1500mm ntev. Cov nto grooved (qhov dav groove 0.5–2.0mm) muaj rau kev faib cov slurry hauv cov txheej txheem lapping. Txhua lub phaj raug tshuaj xyuas nrog laser interferometer thiab muab nrog daim ntawv qhia kev ntsuas qhov tseeb.
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High-Purity Alumina Ceramic End Effector rau Wafer Handling Robots
St.Cera lub alumina ceramic end effector yog ua los ntawm 99.8% Al₂O₃ uas muaj purity siab siv cov khoom siv sib tsoo CNC 5-axis siab heev. Peb cov peev xwm tsim khoom suav nrog cov tshuab sib tsoo precision thiab CNC machining centers, ua rau cov geometries nyuaj nrog kev ua haujlwm siab. Lub end effector muaj cov profile nyias (nyias li 1.5 hli) nrog ntug tapered rau kev ntxig wafer du. Cov khoom siv muab kev ruaj khov siab (Young's modulus 380 GPa), kev tiv thaiv kev hnav zoo heev, thiab kev ruaj khov thermal txog li 800 ° C. Txhua chav tsev yog precision grounded kom ua tiav qhov tiaj tus ntawm 0.003 hli, parallelism ntawm 0.002 hli, thiab qhov tiav ntawm Ra0.1, ua kom ntseeg tau tias kev sib cuag wafer sib xws thiab kev ua haujlwm tsis muaj khoom me me hauv semiconductor FAB ib puag ncig. Muaj qhov ntev ntawm 150 hli txog 450 hli, nrog cov geometries taub hau (edge grip, Bernoulli, tiaj tus) thiab mounting flanges kom haum rau OEM robots. Cov kev xaiv tiav ntawm qhov chaw suav nrog lapped, polished, lossis ESD dissipative coating (10⁶–10⁹ Ω/sq).
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Alumina Nqus Tsev Chuck rau Precision Dicing & Grinding
St.Cera lub tshuab nqus tsev alumina chuck yog tsim los ntawm 99.8% siab-purity Al₂O₃ nrog cov qhov nqus tsev precision-machined. Peb lub peev xwm sib tsoo precision ua tiav qhov tiaj tus ntawm 0.003mm thiab parallelism ntawm 0.002mm, ua kom ntseeg tau tias wafer fixation tsis muaj warp thaum dicing, backside sib tsoo, thiab kev tshuaj xyuas. Cov khoom siv muaj lub zog flexural siab (361 MPa), hardness (16 GPa), thiab thermal stability txog li 800 ° C. Muaj nyob rau hauv cov qauv puag ncig txog li 600mm sab nraud txoj kab uas hla (OD) thiab cov duab plaub fab txog li 1500 hli ntev. Cov qhov nqus tsev yog tsim tshwj xeeb (concentric, radial, lossis grid qauv) kom haum rau cov txheej txheem tshwj xeeb. Txhua lub chuck raug tshuaj xyuas nrog laser interferometer thiab muab nrog daim ntawv qhia txog kev txheeb xyuas qhov tiaj tus.
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Lub Tshuab Nqus Tsev SiC Uas Muaj Hlau Txhawb Rau Kev Tuav Tes Uas Muaj Qhov Thiab Nyias
St.Cera lub tshuab nqus tsev ua los ntawm cov hlau ua los ntawm cov khoom siv ceramic ua ke ib txheej ceramic silicon carbide (SiC) uas muaj qhov porous nrog lub hauv paus hlau uas ua los ntawm cov hlau uas ua tiav lawm (txhuas lossis hlau tsis xeb). Cov khoom siv SiC uas muaj qhov porous (xiav-dub, porosity 35–40%, qhov pore loj 20–30 μm, permeability 60 ml/cm²·min) muab kev faib tawm ntawm lub tshuab nqus tsev zoo ib yam, maj mam thoob plaws tag nrho cov wafer nto, tshem tawm cov cim ntug thiab ua kom tsis txhob muaj kev sib cuag rau cov wafer nyias (≤100 μm) lossis wafer uas nkhaus. Txheej SiC muaj kev nthuav dav thermal qis (3.5 × 10⁻⁶/℃), kev ruaj khov thermal txog li 1000°C, thiab lub zog flexural nruab nrab (32–35 MPa). Lub hauv paus hlau ntxiv kev ruaj khov ntawm cov qauv, yooj yim mounting ntawm cov qhov threaded, thiab kev tiv thaiv kev tawg brittle. Lub chuck no zoo tagnrho rau kev sib tsoo backside, dicing, thiab kev ua wafer kub siab uas qhov sib xws ntawm lub tshuab nqus tsev thiab thermal sib xws yog qhov tseem ceeb.
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Phaj Alumina Ceramic Uas Muaj Peev Xwm Siab - rau Kev Rwb Thaiv Tsev & Cov Khoom Siv Kub Siab
Cov phaj ceramic ntawm St.Cera yog tsim los ntawm 99.8% alumina uas muaj purity siab (Al₂O₃), muaj zog dielectric siab (15 × 10⁶ V/m), ruaj khov thermal txog li 1600°C, thiab tiv taus kev hnav zoo heev. Cov phaj raug lapped kom ua tiav qhov tiaj tiaj ≤5 μm dhau 100 hli thiab qhov roughness ntawm qhov chaw Ra ≤0.4 μm. Muaj cov tuab txheem txij li 1 hli txog 20 hli, qhov loj me tshwj xeeb txog li 500 × 500 hli. Siv ua cov insulators hluav taws xob, cov hauv paus cua sov, cov ntaub thaiv chamber, thiab cov khoom siv nqus tsev vacuum chuck.
