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Mgbaaka mkpuchi Alumina PVD maka Sistemụ Nchekwa Uzuoku Ahụ
A na-eji 99.8% alumina dị ọcha (Al₂O₃) emepụta mgbanaka mkpuchi PVD nke St.Cera maka ojiji na sistemụ ebe a na-etinye anwụrụ ọkụ (PVD). Mgbanaka ahụ na-enye ikewapụ eletriki n'etiti ihe ndị dị n'ime ụlọ, na-egbochi arcing ma na-ahụ na ọrụ plasma kwụsiri ike. Ihe ndị dị mkpa gụnyere ike dielectric dị elu (15×10⁶ V/m), nguzogide pụrụ iche >10¹⁴ Ω·mm²/m, na nkwụsi ike okpomọkụ ruo 1600°C. Ike igwe anyị na-arụ ọrụ nke ọma na-enweta dayameta mpụta ruo 600mm, dayameta ime ruo 0.2mm, larịị nke 0.003mm, na njedebe elu Ra0.1. Enweghị porosity na enweghị ike kemịkalụ nke mgbanaka ahụ na-eme ka a pụrụ ịtụkwasị obi ogologo oge na gburugburu ebe a na-agba mmiri ọkụ.
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Akụkụ seramiiki Alumina maka Sistemụ E-Gun Evaporation
St.Cera na-emepụta ihe seramiiki alumina dị ọcha nke 99.8% nke e mere kpọmkwem maka sistemụ ikuku elektrọn (E-gun). Akụkụ ndị a gụnyere ihe mkpuchi crucible, ihe mkpuchi beam deflector, ihe mkpuchi, na ihe ndị e ji etinye ihe. Ihe a na-enye ike dielectric dị elu (15 × 10⁶ V/m), nkwụsi ike okpomọkụ ruo 1600°C, yana iguzogide ujo okpomọkụ na mwakpo kemịkalụ sitere na ihe ndị a na-ekupụ. Ike igwe anyị nke ọma na-enweta geometrị dị mgbagwoju anya nwere obere nha atụmatụ 0.2mm, larịị 0.003mm, na njedebe elu Ra0.1. A na-enyocha akụkụ ọ bụla 100% CMM maka izi ezi nha.
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Efere seramiiki Alumina nke buru ibu maka Semiconductor na ihe eji arụ ọrụ ụlọ ọrụ
St.Cera na-emepụta efere seramiiki buru ibu site na 99.8% alumina dị ọcha nke ukwuu (Al₂O₃) yana oke nha ya ruru 1500mm n'ogologo na 600mm n'obosara. Ike igwe anyị na-egweri ihe nke ọma na-enweta ịdị larịị nke 0.003mm karịa 100mm na nha nha nke 0.002mm, na-ahụ na elu ya dị mma maka ngwa buru ibu. Ọkpụrụkpụ ya ruru 100mm, imecha elu ya ruo Ra0.1. Efere ndị a na-eje ozi dị ka ntọala ihe mkpofu, efere ihe na-ekpo ọkụ, panel mkpuchi eletriki, na ala ụlọ nhazi na semiconductor, ngosi, na mmepụta fotovoltaic. Enwere oghere dị n'ime ya, ihe mgbochi, na nhazi akụkụ.
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Mgbaaka Ceramic Alumina nke Alumina maka Ịkpuchi, Mkpuchi na Ịwụnye
A na-eji ígwè seramiiki nke St.Cera mee ihe nke ọma site na 99.8% alumina dị ọcha nke ukwuu (Al₂O₃) maka ngwa ndị chọrọ oke nguzogide iyi, mkpuchi eletriki, na nkwụsi ike okpomọkụ ruo 1600°C. Ike mmepụta anyị na-akwado dayameta mpụta ruo 600mm, ọkpụrụkpụ ruo 100mm, na dayameta ime dị obere dị ka 0.2mm, yana larịị nke 0.003mm, parallelism nke 0.002mm, na concentricity nke 0.01mm. Dị ka mgbaaka mkpuchi, mgbaaka oghere, mgbaaka njide, ma ọ bụ profaịlụ omenala. Enweghị porosity na enweghị ike kemịkalụ nke ihe ahụ na-eme ka ọ dabara adaba maka gburugburu kemịkalụ na plasma siri ike.
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Tube Ceramic Alumina Dị Ọcha Dị Elu Maka Gburugburu Okpomọkụ Dị Elu na Nrụgide
A na-eji alumina dị ọcha nke 99.8% (Al₂O₃) emepụta ọkpọkọ seramiiki St.Cera, na-enye ezigbo nkwụsi ike okpomọkụ ruo 1600°C, ike dielectric dị elu (15×10⁶ V/m), yana iguzogide kemịkalụ dị elu. Ike igwe anyị na-arụ ọrụ nke ọma na-eme ka dayameta dị n'ime dị obere dịka 0.2mm, dayameta mpụta ruo 600mm, na ogologo ruo 1500mm, yana nha 0.005mm, concentricity nke 0.01mm, na njedebe elu nke Ra0.1. Enweghị porosity nke ọkpọkọ ahụ (0% mmiri na-abanye) na-egbochi ịpụ apụ na gburugburu ikuku, na-eme ka ọ dị mma maka ọkụ mgbasa semiconductor, nchebe thermocouple, na nhazi kemịkalụ. Enwere ike ịnweta ọkpụrụkpụ mgbidi na nhazi njedebe (dị larịị, dị larịị, dị larịị).
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Akụkụ seramiiki Alumina ahaziri maka Semiconductor na akụrụngwa ụlọ ọrụ mmepụta ihe
St.Cera na-emepụta akụkụ seramiiki ahaziri ahazi site na 99.8% alumina dị ọcha (Al₂O₃) dịka eserese ndị ahịa si dị. Ebe anyị nwere igwe egweri ihe ziri ezi na ebe igwe CNC, nke na-eme ka mmepụta nke ihe seramiiki dị mgbagwoju anya na ezigbo nkenke. Akụkụ ndị a na-ahụkarị gụnyere ihe mkpuchi, bọọlụ na-ebu ibu, mgbaaka mkpuchi, bushings, ihe ndozi ahaziri ahazi, na geometries dị mgbagwoju anya. Ike nrụpụta anyị na-akwado
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Alumina seramiiki nozzle maka ịgba gas/mmiri okpomọkụ dị elu
A na-eji ihe mkpuchi seramiiki nke St.Cera mee ihe nke ọma site na 99.8% alumina dị ọcha (Al₂O₃), na-enye ike iguzogide iyi dị elu (Vickers 16 GPa), enweghị ike ime ihe ọ bụla, yana ike okpomọkụ ruo 1600°C. Ike igwe anyị na-arụ ọrụ nke ọma na-enweta dayameta dị n'ime dị obere dịka 0.2mm, yana nha nha nke 0.005mm na concentricity nke 0.01mm, na-ahụ na mmiri na-aga n'ihu na nkesa mmiri/gas ziri ezi. Nozzle ahụ nwere oghere dị nro dị n'ime ya nke nwere njedebe elu Ra0.1, na-ebelata iguzogide mmiri ma na-ebelata mkpọchi. Diamita nke oghere site na 0.2mm ruo 5.0mm, yana geometry ahaziri ahazi gụnyere oghere kwụ ọtọ, nke gbagọrọ agbagọ, ma ọ bụ nke nwere ọtụtụ oghere. A na-enyocha nozzle ọ bụla n'akụkụ ma lelee maka nha nha nke mmiri na-aga.
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Efere Alumina dị ọcha nke e ji ígwè gwerie ihe maka ịkpụcha ihe
E ji alumina dị ọcha nke 99.8% (Al₂O₃) emepụta efere seramiiki nke St.Cera maka ịkpụcha na ịkpụcha ihe nke ọma. Ike ịkpụcha ihe anyị nwere na-enweta ịdị larịị nke 0.003mm, nha nha nke 0.002mm, na imecha elu nke Ra0.1, na-eme ka e wepụ ihe dị iche iche n'elu efere ahụ dum. Efere ahụ na-enye ezigbo nguzogide iyi (Vickers 16 GPa), ike flexural dị elu (361 MPa), na nkwụsi ike okpomọkụ ruo 800°C. Dị na usoro gburugburu ruo dayameta 600mm na efere akụkụ anọ ruo ogologo 1500mm. E nwere ebe a na-akpọ grioved (obosara oghere 0.5–2.0mm) maka nkesa slurry na usoro ịkụcha ihe. A na-enyocha efere ọ bụla site na iji laser interferometer ma nye ya akụkọ nha ziri ezi.
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Ihe na-eme ka ígwè ọrụ seramiiki dị ọcha nke alumina dị elu maka ígwè ọrụ Wafer
A na-eji ngwa CNC dị elu nke nwere alumina seramiiki eme ihe nke St.Cera site na iji 99.8% dị ọcha nke ukwuu site na iji ngwa CNC dị elu nke nwere axis 5-axis. Ike nrụpụta anyị gụnyere igwe ngwecha ziri ezi na ebe igwe CNC, na-eme ka geometri dị mgbagwoju anya nwee ezigbo nkenke. Ihe ngwecha njedebe nwere profaịlụ dị gịrịgịrị (dị gịrịgịrị dịka 1.5 mm) yana akụkụ isi dị mkpụmkpụ maka ntinye wafer dị nro. Ihe a na-enye ike dị elu (modulus Young's 380 GPa), iguzogide iyi dị mma, na nkwụsi ike okpomọkụ ruo 800°C. A na-egweri nkeji ọ bụla nke ọma iji nweta larịị nke 0.003mm, parallelism nke 0.002mm, na njedebe elu nke Ra0.1, na-ahụ na kọntaktị wafer na-aga n'ihu na ọrụ na-enweghị ihe dị na gburugburu semiconductor FAB. Dị na ogologo site na 150 mm ruo 450 mm, yana geometries pụrụ iche (njide ọnụ, Bernoulli, flat) na flanges arụnyere iji dabara na robot OEM. Nhọrọ imecha elu gụnyere mkpuchi a kpụchara akpụcha, nke a kpụchara akpụcha, ma ọ bụ nke ESD (10⁶–10⁹ Ω/sq).
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Alumina Vacuum Chuck maka nkenke ịkpụ na egweri
A na-eji Al₂O₃ dị ọcha nke ukwuu 99.8% eme ihe site na oghere ikuku dị nkọ nke e ji igwe rụọ. Ike igwe anyị na-egweri ihe nke ọma na-enweta ịdị larịị nke 0.003mm na nha nhata nke 0.002mm, na-eme ka a na-edozi wafer na-enweghị wap n'oge ịkpụ, ịkpụ azụ, na inyocha ya. Ihe a na-enye ike mgbanwe dị elu (361 MPa), ike siri ike (16 GPa), na nkwụsi ike okpomọkụ ruo 800°C. Dị na usoro gburugburu ruo dayameta mpụta 600mm (OD) na ọdịdị akụkụ anọ ruo ogologo 1500mm. E mepụtara oghere ikuku nke ọma (usoro concentric, radial, ma ọ bụ grid) iji kwekọọ na ihe achọrọ maka usoro. A na-enyocha chuck ọ bụla site na iji laser interferometer ma nye ya akụkọ nkwenye dị larịị.
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Igwe eji ígwè mee ka ọ dị nro ma dị nro maka njikwa Wafer SiC
Ihe mkpuchi seramiiki nke St.Cera nke e ji ígwè rụọ na-ejikọta akwa seramiiki silicon carbide (SiC) nke nwere ntọala ígwè a na-eji ígwè arụ ọrụ nke ọma (aluminom ma ọ bụ ígwè anaghị agba nchara). Ihe SiC nke nwere oghere (acha anụnụ anụnụ-ojii, porosity 35–40%, nha oghere 20–30 μm, permeability 60 ml/cm²·min) na-enye nkesa oghere dị nro, nke dị nro n'elu elu wafer dum, na-ewepụ akara nsọtụ ma na-enye nkwado na-anaghị emetụ aka maka obere (≤100 μm) ma ọ bụ wafer ndị gbagọrọ agbagọ. Oyi akwa SiC na-enye obere mgbasawanye okpomọkụ (3.5×10⁻⁶/℃), nkwụsi ike okpomọkụ ruo 1000°C, na ike flexural dị ala (32–35 MPa). Ntọala ígwè ahụ na-agbakwụnye ike nhazi, ntinye dị mfe site na oghere eriri, na nchebe megide mgbawa gbagọrọ agbagọ. Chuck a dị mma maka ịkpụ azụ, ịkpụ, na nhazi wafer okpomọkụ dị elu ebe oghere oghere na ndakọrịta okpomọkụ dị oke mkpa.
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Efere seramiiki Alumina dị ọcha nke ukwuu - maka mkpuchi na ihe ndị na-ekpo ọkụ dị elu
E ji alumina dị ọcha nke 99.8% (Al₂O₃) rụọ efere seramiiki St.Cera, nke nwere ike dielectric dị elu (15×10⁶ V/m), nkwụsi ike okpomọkụ ruo 1600°C, yana iguzogide iyi dị mma. E ji ihe ndị a mee ka ha dị larịị nke ≤5 μm karịa 100 mm na oke elu Ra ≤0.4 μm. A na-enweta ha n'ọkpụrụkpụ ọkọlọtọ site na 1 mm ruo 20 mm, nha ahaziri ahazi ruo 500 × 500 mm. A na-eji ha eme ihe dị ka ihe mkpuchi eletriki, ntọala ihe na-ekpo ọkụ, ihe mkpuchi ụlọ, na ihe ndị e ji ekpo ọkụ.
