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Indandatho Yokufaka I-Alumina PVD Yezinhlelo Zokufaka Umusi Ongokoqobo
Indandatho yokufakelwa ye-PVD kaSt.Cera yenziwe nge-alumina engu-99.8% ehlanzekile kakhulu (Al₂O₃) ukuze isetshenziswe ezinhlelweni zokufakwa komoya ophathekayo (i-PVD). Indandatho inikeza ukuhlukaniswa kukagesi phakathi kwezingxenye zegumbi, ivimbela ukugoba nokuqinisekisa ukusebenza okuzinzile kwe-plasma. Izakhiwo ezibalulekile zifaka phakathi amandla aphezulu e-dielectric (15×10⁶ V/m), ukumelana okuthile >10¹⁴ Ω·mm²/m, kanye nokuqina kokushisa okufika ku-1600°C. Amakhono ethu okulungisa ngokunemba afinyelela ububanzi bangaphandle obufika ku-600mm, ububanzi bangaphakathi obufika ku-0.2mm, ukuthamba okungu-0.003mm, kanye nokuphela kobuso okungu-Ra0.1. Ukungavuki kwendandatho kanye nokungangeni kwamakhemikhali kuqinisekisa ukuthembeka kwesikhathi eside ezindaweni ezinolaka.
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Izingxenye ze-Alumina Ceramic ze-E-Gun Evaporation Systems
I-St.Cera ikhiqiza izingxenye ze-alumina ceramic ezingama-99.8% ezihlanzekile kakhulu eziklanyelwe ngqo izinhlelo zokuhwamuka kwe-electron beam (E-gun). Lezi zingxenye zifaka phakathi ama-crucible liners, izihlangu ze-beam deflector, ama-insulator, kanye nezinto zokufaka. Izinto zinikeza amandla aphezulu e-dielectric (15×10⁶ V/m), ukuzinza kokushisa okufika ku-1600°C, kanye nokumelana okuhle kakhulu nokushaqeka kokushisa kanye nokuhlaselwa ngamakhemikhali okuvela ezintweni ezihwamukile. Amakhono ethu okulungisa ngokunemba afinyelela amajiyometri ayinkimbinkimbi ngosayizi wesici ophansi ongu-0.2mm, ukuthamba okungu-0.003mm, kanye nokuphela kobuso okungu-Ra0.1. Ingxenye ngayinye ihlolwe ngo-100% CMM ukuze kutholakale ukunemba kobukhulu.
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Ipuleti le-Ceramic le-Alumina Elikhulu Le-Semiconductor kanye Nezimo Zezimboni
I-St.Cera ikhiqiza amapuleti e-ceramic amakhulu avela ku-99.8% i-alumina ehlanzekile ephezulu (Al₂O₃) enobukhulu obuphezulu obufika ku-1500mm ubude kanye nobubanzi obungu-600mm. Amakhono ethu okugaya ngokunemba afinyelela ubucaba obungu-0.003mm ngaphezu kuka-100mm kanye nokulingana okungu-0.002mm, okuqinisekisa ikhwalithi yendawo ehambisanayo yezinhlelo zokusebenza zendawo enkulu. Ubukhulu bufika ku-100mm, ukuqeda kwendawo kuya ku-Ra0.1. Lawa mapuleti asebenza njengezisekelo ze-vacuum chuck, ama-heater platens, amaphaneli okushisa kagesi, kanye nezitezi zegumbi lokucubungula ekukhiqizweni kwe-semiconductor, ukubonisa, kanye ne-photovoltaic. Kutholakala imigodi edlulayo, ama-counterbores, kanye ne-edge profile.
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Indandatho Ye-Ceramic Eqondile Ye-Alumina Yokuvala, Ukufaka Ukushisa Nokubumba
Indandatho ye-ceramic kaSt.Cera yenziwe ngomshini oqondile kusukela ku-99.8% i-alumina ehlanzekile kakhulu (Al₂O₃) ukuze isetshenziswe ekufuneni ukumelana nokuguguleka okuphezulu, ukufudumala kukagesi, kanye nokuqina kokushisa okufika ku-1600°C. Amakhono ethu okukhiqiza asekela ububanzi bangaphandle obufika ku-600mm, ubukhulu obufika ku-100mm, kanye nobubanzi bangaphakathi obuncane njengo-0.2mm, obunobubanzi obungu-0.003mm, ukulingana okungu-0.002mm, kanye nokugxila okungu-0.01mm. Itholakala njengendandatho yokuvala, izindandatho zesikhala, izindandatho zokugcina, noma amaphrofayili enziwe ngokwezifiso. Ukungaguquguquki kwezinto kanye nokungaguquguquki kwamakhemikhali kwenza kube kufanelekile ezindaweni ezinolaka zamakhemikhali ne-plasma.
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I-High-Purity Alumina Ceramic Tube Yezindawo Ezishisa Kakhulu Nezimo Ezigqwalisayo
Ishubhu le-ceramic likaSt.Cera lenziwe nge-alumina engu-99.8% ehlanzekile kakhulu (Al₂O₃), enikeza ukuzinza okuhle kakhulu kokushisa okufika ku-1600°C, amandla aphezulu e-dielectric (15×10⁶ V/m), kanye nokumelana okuphezulu kwamakhemikhali. Amakhono ethu okulungisa ngokunemba avumela ububanzi bangaphakathi obuncane njengo-0.2mm, ububanzi bangaphandle obufika ku-600mm, kanye nobude obufika ku-1500mm, ngokuqondeka okungu-0.005mm, ukugxila okungu-0.01mm, kanye nokuphela kobuso okungu-Ra0.1. I-zero porosity yeshubhu (0% ukumuncwa kwamanzi) ivimbela ukuphuma kwegesi ezindaweni zokuhlanza, okwenza kube kuhle kakhulu kuma-furniture okusabalalisa ama-semiconductor, ukuvikelwa kwe-thermocouple, kanye nokucutshungulwa kwamakhemikhali. Ubukhulu bodonga olwenziwe ngokwezifiso kanye nokucushwa kokuphela (okuyisicaba, okunciphile, okune-flange) kuyatholakala.
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Izingxenye Ze-Ceramic Ze-Alumina Zenziwe Ngokwezifiso Zemishini Ye-Semiconductor Nezimboni
I-St.Cera ikhiqiza izingxenye ze-ceramic ezenziwe ngokwezifiso kusuka ku-99.8% i-alumina ehlanzekile kakhulu (Al₂O₃) ngokwemidwebo yamakhasimende. Isikhungo sethu sihlonyiswe ngemishini yokugaya enembile kanye nezikhungo zokugaya ze-CNC, okuvumela ukukhiqizwa kwezingxenye ze-ceramic eziyinkimbinkimbi ngokunemba okuphezulu. Izingxenye ezijwayelekile zifaka phakathi ama-insulator, amabhola okuthwala, amasongo okuvala, ama-bushing, izinto ezenziwe ngokwezifiso, kanye nama-geometri ayinkimbinkimbi. Amakhono ethu okukhiqiza ayasekela
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I-Alumina Ceramic Nozzle Yokujova Igesi/Uketshezi Oluphezulu
I-nozzle ye-ceramic kaSt.Cera yenziwe ngokunemba kusuka ku-99.8% i-alumina ehlanzekile kakhulu (Al₂O₃), enikeza ukumelana okuphezulu kokuguguleka (i-Vickers 16 GPa), ukungangeni kwamakhemikhali, kanye nokuqina kokushisa kuze kufike ku-1600°C. Amakhono ethu okusebenza ngokunemba afinyelela ububanzi bangaphakathi obuncane njengo-0.2mm, ngokunemba okungu-0.005mm kanye nokugxila okungu-0.01mm, okuqinisekisa ukugeleza okuhambisanayo kanye nokusatshalaliswa koketshezi/igesi okunembile. I-nozzle ine-bore yangaphakathi ebushelelezi ene-surface finish Ra0.1, enciphisa ukumelana kokugeleza futhi inciphise ukuvaleka. Ububanzi be-orifice busukela ku-0.2mm kuya ku-5.0mm, ngamajiyometri enziwe ngokwezifiso kufaka phakathi ama-outlet aqondile, anciphile, noma ama-orifice amaningi. I-nozzle ngayinye ihlolwa ngokwezilinganiso futhi ihlolwe ukuthi iyafana yini nokugeleza.
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Ipuleti Lokugaya le-Alumina Ceramic Elihlanzekile Kakhulu Lokugoqa Ngokuqondile
Ipuleti lokugaya le-ceramic likaSt.Cera lenziwe nge-alumina ehlanzekile ephezulu engu-99.8% (Al₂O₃) yokusetshenziswa kokufaka nokugaya ngokunembile. Amandla ethu okugaya ngokunembile afinyelela ukuthamba okungu-0.003mm, ukulingana okungu-0.002mm, kanye nokuphela kobuso be-Ra0.1, okuqinisekisa ukususwa kwezinto ezifanayo kulo lonke ubuso bepuleti. Ipuleti linikeza ukumelana okuhle kakhulu kokuguguleka (i-Vickers 16 GPa), amandla aphezulu okuguquguquka (361 MPa), kanye nokuqina kokushisa okufika ku-800°C. Litholakala ngamafomethi ayindilinga afika kububanzi obungu-600mm kanye namapuleti angunxande afika ku-1500mm ubude. Izindawo ezigoqiwe (ububanzi bokufaka obungu-0.5–2.0mm) ziyatholakala ukuze kusatshalaliswe i-slurry ezinqubweni zokufaka. Ipuleti ngalinye lihlolwa nge-interferometer ye-laser futhi linikezwe umbiko wokulinganisa ngokunembile.
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Isiphetho Sokuphela Kwe-Alumina Ceramic Esihlanzekile Kakhulu Samarobhothi Okuphatha I-Wafer
I-St.Cera's alumina ceramic end effector yenziwe ngokunemba kusuka ku-99.8% high-purity Al₂O₃ kusetshenziswa imishini yokugaya ye-CNC ethuthukisiwe ene-axis 5. Amakhono ethu okukhiqiza afaka phakathi imishini yokugaya ngokunemba kanye nezikhungo zokugaya ze-CNC, okuvumela amajiyomethri ayinkimbinkimbi ngokunemba okuphezulu. I-end effector inephrofayili encane (encane njenge-1.5 mm) enomkhawulo ophambili onciphile wokufakwa kwe-wafer ebushelelezi. Izinto zokwakha zinikeza ukuqina okuphezulu (i-Young's modulus 380 GPa), ukumelana okuhle kakhulu kokuguguleka, kanye nokuqina kokushisa okufika ku-800°C. Iyunithi ngayinye ihlanzwe ngokunemba ukuze ifinyelele ukuqina okungu-0.003mm, ukulingana okungu-0.002mm, kanye nokuphela kobuso be-Ra0.1, okuqinisekisa ukuthintana kwe-wafer okuqhubekayo kanye nokusebenza okungenazinhlayiya ezindaweni ze-semiconductor FAB. Itholakala ngobude obusukela ku-150 mm kuya ku-450 mm, ngamajiyomethri e-tip angokwezifiso (i-edge grip, i-Bernoulli, i-flange) kanye nama-flange okufaka ukuze alingane namarobhothi e-OEM. Izinketho zokuqeda umphezulu zifaka phakathi i-lapped, polished, noma i-ESD dissipative coating (10⁶–10⁹ Ω/sq).
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I-Alumina Vacuum Chuck Yokusika Nokugaya Ngokuqondile
I-St.Cera's alumina vacuum chuck yenziwe nge-99.8% high-purity Al₂O₃ ene-vacuum grooves enziwe ngomshini oqondile. Amandla ethu okugaya ngokunemba afinyelela ubucaba obungu-0.003mm kanye nokulingana okungu-0.002mm, okuqinisekisa ukuqina kwe-wafer engenama-warp ngesikhathi sokusika, ukugaya ngemuva, kanye nokuhlolwa. Izinto zinikeza amandla aphezulu okugoba (361 MPa), ubulukhuni (16 GPa), kanye nokuqina kokushisa okufika ku-800°C. Itholakala ngamafomethi ayindilinga afika ku-600mm ububanzi bangaphandle (OD) kanye nezimo eziyisikwele ezifika ku-1500mm ubude. I-vacuum grooves yakhelwe ngokwezifiso (amaphethini agxilile, aqondile, noma ama-grid) ukuze ivumelane nezidingo ezithile zenqubo. I-chuck ngayinye ihlolwa nge-laser interferometer futhi inikezwe umbiko wokuqinisekisa ubucaba.
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I-Vacuum Chuck ye-SiC enezimbobo Enensimbi Yokuphatha I-Wafer Egobile Nencane
I-St.Cera's metal based ceramic vacuum chuck ihlanganisa ungqimba lwe-ceramic olunezimbobo ze-silicon carbide (SiC) nesisekelo sensimbi esenziwe ngomshini oqondile (i-aluminium noma insimbi engagqwali). Izinto ze-SiC ezinezimbobo (oluhlaza okwesibhakabhaka-omnyama, izimbobo ezingu-35–40%, usayizi we-pore 20–30 μm, ukuvuleka okungu-60 ml/cm²·min) zinikeza ukusatshalaliswa kwe-vacuum okufanayo, okumnene kulo lonke ubuso be-wafer, kususa ukumakwa komphetho futhi kuvumela ukwesekwa okungenakuthintana kwama-wafer amancane (≤100 μm) noma asontekile. Ungqimba lwe-SiC lunikeza ukwanda okuphansi kokushisa (3.5×10⁻⁶/℃), ukuzinza kokushisa kufika ku-1000°C, kanye namandla okuguquguquka aphakathi (32–35 MPa). Isisekelo sensimbi sengeza ukuqina kwesakhiwo, ukufakwa kalula ngezimbobo ezinezintambo, kanye nokuvikelwa ekuqhekekeni okuqhekekile. Le chuck ilungele ukugaya ngemuva, ukunquma, kanye nokucubungula i-wafer yokushisa okuphezulu lapho i-vacuum efanayo kanye nokuhambisana kokushisa kubalulekile.
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Ipuleti le-Ceramic le-Alumina elihlanzekile kakhulu – lokufaka izinto zokuvikela ukushisa kanye nokushisa okuphezulu
Ipuleti lika-ceramic likaSt.Cera lenziwe nge-alumina engu-99.8% ehlanzekile kakhulu (Al₂O₃), enikeza amandla aphezulu e-dielectric (15×10⁶ V/m), ukuzinza kokushisa kufika ku-1600°C, kanye nokumelana okuhle kakhulu nokuguguleka. Amapuleti ahlanganiswe ngokunemba ukuze afinyelele ukuthamba okungu-≤5 μm ngaphezu kuka-100 mm kanye nokungagugi kobuso okungu-Ra ≤0.4 μm. Itholakala ngobukhulu obujwayelekile kusukela ku-1 mm kuya ku-20 mm, osayizi abangokwezifiso kufika ku-500×500 mm. Isetshenziswa njengezivikeli zikagesi, izisekelo ze-heater, ama-chamber liners, kanye nama-vacuum chuck substrates.
