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Izixhobo zeCeramic zeAlumina ezenziwe ngokwezifiso zeSemiconductor kunye nezixhobo zoShishino
I-St.Cera ivelisa izixhobo zeseramikhi ezenziwe ngokwezifiso nge-99.8% ye-alumina ecocekileyo kakhulu (Al₂O₃) ngokwemizobo yabathengi. Indawo yethu ixhotyiswe ngoomatshini bokugaya ngokuchanekileyo kunye namaziko oomatshini be-CNC, okuvumela ukuveliswa kwezinto zeseramikhi ezintsonkothileyo ngokuchanekileyo okuphezulu. Izixhobo eziqhelekileyo ziquka ii-insulator, iibhola zokuthwala, iiringi zokutywina, ii-bushings, izixhobo ezenziwe ngokwezifiso, kunye nejometri ezintsonkothileyo. Amandla ethu okuvelisa axhasa
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I-Alumina Ceramic Nozzle yoMjovo weGesi/uFluid obushushu obuphezulu
I-nozzle ye-ceramic kaSt.Cera yenziwe ngokuchanekileyo nge-99.8% ye-alumina ephezulu-ecocekileyo (Al₂O₃), inikezela ukumelana nokuguguleka okuphezulu (Vickers 16 GPa), ukungangeni kweekhemikhali, kunye nokuzinza kobushushu ukuya kuthi ga kwi-1600°C. Amandla ethu okulungisa ngokuchanekileyo afikelela kububanzi obuphakathi obuncinci njenge-0.2mm, ngokuthe tye kwe-0.005mm kunye nokuqina kwe-0.01mm, okuqinisekisa ukuhamba rhoqo kunye nokusasazwa okuchanekileyo kolwelo/igesi. I-nozzle ine-inner bore egudileyo ene-surface finish Ra0.1, enciphisa ukumelana nokuhamba kwaye inciphisa ukuvaleka. I-Orifice diameters ukusuka kwi-0.2mm ukuya kwi-5.0mm, kunye nejometri ezenziwe ngokwezifiso kubandakanya iindawo ezithe tye, ezithambileyo, okanye ezine-multi-orifice outlets. I-nozzle nganye ihlolwa ngokwemilinganiselo kwaye ihlolwe ukuba ukuhamba kuhamba kuyafana na.
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Ipleyiti yokugaya i-Alumina Ceramic ecocekileyo kakhulu yokuGqibela ngokuchanekileyo
Ipleyiti yokugaya ye-ceramic yaseSt.Cera yenziwe nge-99.8% ye-alumina ecocekileyo (Al₂O₃) yokusetyenziswa kokugoba nokugoba ngokuchanekileyo. Amandla ethu okugoba ngokuchanekileyo afikelela kwi-0.003mm, ukulingana kwe-0.002mm, kunye nokugqitywa komphezulu we-Ra0.1, okuqinisekisa ukususwa kwezinto ezifanayo kumphezulu wepleyiti yonke. Ipleyiti inika ukumelana okuhle kokuguguleka (iVickers 16 GPa), amandla aphezulu okugoba (361 MPa), kunye nokuzinza kobushushu ukuya kuthi ga kwi-800°C. Ifumaneka kwiifomathi ezijikelezileyo ukuya kuthi ga kwi-600mm ububanzi kunye neepleyiti eziziingxande ukuya kuthi ga kwi-1500mm ubude. Iindawo ezigobileyo (ububanzi begroove 0.5–2.0mm) ziyafumaneka ukuze zisasazwe kwiinkqubo zokugoba ngokuchanekileyo. Ipleyiti nganye ihlolwa nge-laser interferometer kwaye inikwe ingxelo yokulinganisa ngokuchanekileyo.
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Isiphumo Sokuphela Kwe-Alumina Ceramic Esicocekileyo Esiphezulu seRobhothi Zokuphatha I-Wafer
Isixhobo sokugqibela se-alumina ceramic sikaSt.Cera senziwe ngomatshini ochanekileyo kwi-99.8% ye-Al₂O₃ ecocekileyo kakhulu sisebenzisa izixhobo zokugaya ze-CNC ezikumgangatho ophezulu ze-5-axis. Amandla ethu okuvelisa aquka oomatshini bokugaya abachanekileyo kunye namaziko okugaya e-CNC, okuvumela iijiometri ezintsonkothileyo ngokuchanekileyo okuphezulu. Isixhobo sokugqibela sineprofayili encinci (encinci njenge-1.5 mm) kunye nomphetho ophambili othambileyo wokufakwa kwe-wafer egudileyo. Izinto ezisetyenzisiweyo zibonelela ngokuqina okuphezulu (i-Young's modulus 380 GPa), ukumelana nokuguguleka okugqwesileyo, kunye nozinzo lobushushu ukuya kuthi ga kwi-800°C. Iyunithi nganye ilungelelaniswe kakuhle ukuze ifikelele kwi-flatness ye-0.003mm, i-parallelism ye-0.002mm, kunye nokugqitywa komphezulu we-Ra0.1, ukuqinisekisa unxibelelwano oluqhubekayo lwe-wafer kunye nokusebenza okungenazintwana kwiindawo ze-semiconductor FAB. Ifumaneka ngobude ukusuka kwi-150 mm ukuya kwi-450 mm, kunye neejiometri zetiphu ezenziwe ngokwezifiso (i-edge grip, iBernoulli, i-flat) kunye neeflanges zokufaka ukuze zilingane neerobhothi ze-OEM. Iindlela zokugqiba umphezulu ziquka i-lapped, polished, okanye i-ESD dissipative coating (10⁶–10⁹ Ω/sq.).
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I-Alumina Vacuum Chuck yokuDayina nokuGrila ngokuchanekileyo
I-St.Cera's alumina vacuum chuck yenziwe nge-99.8% ye-Al₂O₃ ecocekileyo kakhulu ene-precision-machined vacuum grooves. Amandla ethu okusila ngokuchanekileyo afikelela kwi-0.003mm kunye ne-parallelism ye-0.002mm, ukuqinisekisa ukuba i-wafer ayina-warp fixation ngexesha lokusika, ukusila ngasemva, kunye nokuhlolwa. Le nto inika amandla aphezulu okugoba (361 MPa), ubunzima (16 GPa), kunye nozinzo lobushushu ukuya kuthi ga kwi-800°C. Ifumaneka kwiifomathi ezijikelezileyo ukuya kuthi ga kwi-600mm outer diameter (OD) kunye neemilo ezingxande ukuya kuthi ga kwi-1500mm ubude. Ii-vacuum grooves zenziwe ngokwezifiso (iipateni ze-concentric, radial, okanye grid) ukuze zihambelane neemfuno ezithile zenkqubo. I-chuck nganye ihlolwa nge-laser interferometer kwaye inikwe ingxelo yokuqinisekisa ukuba i-flatness iqinile.
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I-SiC Vacuum Chuck ene-Porous exhaswa yiMetal-Backed ukuze iphathe iWafer egobileyo neyincinci
I-St.Cera's metal based ceramic vacuum chuck idibanisa umaleko we-ceramic we-silicon carbide (SiC) onemingxuma kunye nesiseko sesinyithi esenziwe ngokuchanekileyo (i-aluminium okanye intsimbi engatyiwayo). Izinto ze-SiC ezinemingxuma (eziluhlaza okwesibhakabhaka-mnyama, ii-porosity ezingama-35–40%, ubungakanani be-pore 20–30 μm, i-permeability engama-60 ml/cm²·min) zibonelela ngokusasazwa kwe-vacuum okufanayo, okuthambileyo kuwo wonke umphezulu we-wafer, kususa uphawu lomphetho kunye nokuvumela inkxaso engabonakaliyo kwii-wafers ezincinci (≤100 μm) okanye ezigobileyo. Umaleko we-SiC ubonelela ngokwandiswa okuphantsi kobushushu (3.5×10⁻⁶/℃), ukuzinza kobushushu ukuya kuthi ga kwi-1000°C, kunye namandla aphakathi okugoba (32–35 MPa). Isiseko sesinyithi songeza ukuqina kwesakhiwo, ukufakwa lula ngemingxunya enemisonto, kunye nokukhuselwa ekuqhekekeni okubuthathaka. Le chuck ifanelekile ekugayweni ngasemva, ukugaywa, kunye nokulungiswa kwe-wafer yobushushu obuphezulu apho i-vacuum efanayo kunye nokuhambelana kobushushu kubalulekile.
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Ipleyiti yeCeramic ye-Alumina ecocekileyo kakhulu – yokukhusela kunye nobushushu obuphezulu
Ipleyiti yeseramikhi yaseSt.Cera yenziwe nge-99.8% ye-alumina ecocekileyo kakhulu (Al₂O₃), enika amandla aphezulu e-dielectric (15×10⁶ V/m), uzinzo lobushushu olufikelela kwi-1600°C, kunye nokumelana nokuguguleka okugqwesileyo. Iipleyiti zilungelelaniswe ngokuchanekileyo ukuze zifikelele ekubeni zithe tyaba ≤5 μm ngaphezu kwe-100 mm kunye noburhabaxa bomphezulu Ra ≤0.4 μm. Ifumaneka ngobukhulu obuqhelekileyo ukusuka kwi-1 mm ukuya kwi-20 mm, ubungakanani obulungiselelweyo ukuya kuthi ga kwi-500×500 mm. Isetyenziswa njenge-insulators zombane, iziseko ze-heater, ii-chamber liners, kunye ne-vacuum chuck substrates.
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Intonga yendawo yeCeramic echanekileyo ye-Alumina yezixhobo zeSemiconductor
Intonga yendawo yeseramikhi yaseSt.Cera igutyungelwe ngokuchanekileyo ukusuka kwi-99.8% ye-alumina ecocekileyo (Al₂O₃). Inika ubulukhuni obuphezulu (16 GPa), ukumelana nokuguguleka okugqwesileyo, kunye nozinzo olulinganayo. Ubukhulu bokunyamezela buqinile njenge ±0.005 mm, ubude bufikelela kwi 150 mm. Umphezulu wentonga ujikelezwe kwi Ra ≤0.2 μm ukuze kufakwe kwaye kususwe ngokutyibilikayo. Isetyenziswa njengee-alignment pin, ii-dowel pin, okanye ii-positioning stops kwi-semiconductor process fixtures, ii-wafer cassette, kunye nezixhobo zokuhlola.
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Intonga yeCeramic yeZirconia enamandla aphezulu – yeeShafts kunye neePunches ezichanekileyo
Intonga yeseramikhi ye-zirconia yaseSt.Cera igutyungelwe ngokuchanekileyo kwi-yttria-stabilized ZrO₂. Inika amandla angaqhelekanga okugoba (1000 MPa), ukuqina kokuqhekeka (5–8 MPa·m¹/²), kunye nobunzima beVickers (13 GPa). Intonga inembonakalo emnyama okanye emhlophe, ubuninzi be-6.03 g/cm³, kwaye ayinazo iimbobo. Ububanzi ukusuka kwi-1 mm ukuya kwi-50 mm, ubude ukuya kwi-200 mm, kunye nokunyamezela okuqinileyo njenge-±0.005 mm. Ukugqitywa komphezulu kudibene ne-Ra ≤0.2 μm. Ifanelekile kwizicelo ezigugileyo ezifana nee-plunger, ii-shafts, ii-dowel pins, kunye nee-cutting tool blanks.
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Iinxalenye zeCeramic zeZirconia eziZinzisiweyo zeYttria – Ukuqina Okuphezulu kunye nokuxhathisa ukunxitywa
I-St.Cera ivelisa iindawo zeseramikhi ze-zirconia ezenziwe ngokwezifiso isebenzisa i-yttria-stabilized ZrO₂ (Y-TZP). Ezi zinto zinika amandla angaqhelekanga okugoba (1000 MPa), ubunzima bokuqhekeka okuphezulu (5–8 MPa·m¹/²), kunye nobunzima beVickers be-13 GPa. Ubuninzi yi-6.03 g/cm³, kwaye akukho kufuma kwamanzi. Iindawo zinokubonelelwa ngombala omhlophe okanye omnyama. Indlela yokuqinisa utshintsho eyahlukileyo yeZirconia inika ukumelana okuhle kakhulu nokwanda kwee-crack, okwenza ukuba ilungele izinto ezichaphazeleka yimpembelelo, ukutshayiswa kobushushu, okanye uxinzelelo oluphezulu. Iindawo eziqhelekileyo ziquka izihlalo zevalvu, ii-pump plunger, ii-fiber guide pin, izixhobo zokusika, kunye nee-bushings ezingagugiyo.
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Iindawo ze-Alumina ze-ST.CERA ezenziwe ngokwezifiso ze-99.5% ze-Alumina
Iindawo zesakhelo se-ceramic ligama eliqhelekileyo leemilo ezahlukeneyo ezintsonkothileyo zeendawo ze-ceramic. Zenziwe ngomgubo we-ceramic ococekileyo kakhulu, iindawo ze-ceramic zenziwe ngokucinezela okomileyo okanye ngokucinezela okubandayo kwe-isostatic, kwaye zitshiswe phantsi kobushushu obuphezulu, emva koko zenziwe ngomatshini ochanekileyo. Zisetyenziswa kakhulu kwizixhobo ze-semiconductor, unxibelelwano lwe-optical, i-laser, izixhobo zonyango, i-petroleum, i-metallurgy, amashishini e-elektroniki aneempawu zayo ezifana nokuxhathisa ubushushu obuphezulu, ukuxhathisa ukugqwala, ukuxhathisa ukukrala kunye nokufakelwa.
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Iindawo ze-Alumina ze-ST.CERA ezenziwe ngokwezifiso ze-99.5% ze-Alumina
Iindawo zesakhiwo se-ceramic ligama eliqhelekileyo leemilo ezahlukeneyo ezintsonkothileyo zeendawo ze-ceramic. Zisetyenziswa kakhulu kwizixhobo ze-semiconductor, unxibelelwano lwe-optical, i-laser, izixhobo zonyango, i-petroleum, i-metallurgy, amashishini e-elektroniki aneempawu ezifana nokumelana nobushushu obuphezulu, ukumelana nokugqwala, ukumelana nokukrwada kunye nokufakwa kwe-insulation.
