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Mhete yeAlumina PVD yekudzivirira vapor systems
Mhete yekudzivirira yeSt.Cera's PVD inogadzirwa kubva ku99.8% high-purity alumina (Al₂O₃) inoshandiswa mu physical vapor deposition (PVD) systems. Mhete iyi inopa magetsi pakati pezvikamu zvemukamuri, ichidzivirira arcing uye ichivimbisa kushanda kwakasimba kweplasma. Zvinhu zvikuru zvinosanganisira simba re dielectric rakawanda (15×10⁶ V/m), resistance chaiyo >10¹⁴ Ω·mm²/m, uye kugadzikana kwekupisa kusvika 1600°C. Kugona kwedu kugadzira nemazvo kunoita kuti dhayamita dzekunze dzisvike 600mm, dhayamita dzemukati dzisvike 0.2mm, flatness ye 0.003mm, uye surface finish Ra0.1. Zero porosity yemhete iyi uye chemical inertness zvinoita kuti igare kwenguva refu munzvimbo dzine hukasha.
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Zvikamu zveAlumina Ceramic zveE-Gun Evaporation Systems
St.Cera inogadzira zvinhu zve ceramic zve alumina zvine hutsanana hwakanyanya 99.8% zvakagadzirirwa masisitimu e evaporation e electron beam (E-gun). Zvikamu izvi zvinosanganisira crucible liners, beam deflector shield, insulators, uye mounting fixtures. Zvinhu izvi zvinopa simba re dielectric rakakwirira (15×10⁶ V/m), kugadzikana kwekupisa kusvika 1600°C, uye kuramba kwakanaka kwekupisa uye kurwiswa nemakemikari kubva kuzvinhu zvakapwanyika. Kugona kwedu kugadzira nemazvo kunoita kuti pave ne geometries dzakaoma nehukuru hushoma hwe feature size 0.2mm, flatness 0.003mm, uye surface finish Ra0.1. Chikamu chimwe nechimwe chinoongororwa 100% CMM kuti chionekwe kuti chakarurama.
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Hombe-Fomati Alumina Ceramic Plate yeSemiconductor & Industrial Fixtures
St.Cera inogadzira mapurati makuru eceramic kubva pa99.8% high-purity alumina (Al₂O₃) ane saizi yepamusoro inosvika 1500mm pakureba uye 600mm paupamhi. Kugona kwedu kugaya nemazvo kunoita kuti pave nehupamhi hwe 0.003mm pamusoro pe 100mm uye hupamhi hwe 0.002mm, zvichiita kuti pave nehupamhi hwepamusoro hunoenderana nekushandiswa munzvimbo huru. Ukobvu hunosvika 100mm, magumo epamusoro anosvika Ra0.1. Mapurati aya anoshanda se vacuum chuck bases, heater platens, electrical insulation panels, uye process chamber floors mu semiconductor manufacturing, display, uye photovoltaic manufacturing. Maburi ekupfuura, counterbores, uye edge profiles zviripo.
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Mhete yeAlumina Ceramic Yakakodzera Yekuvhara, Kuvhara & Kugadzirisa
Mhete yeSt.Cera yakagadzirwa nemazvo kubva pa99.8% high-purity alumina (Al₂O₃) yekushandisa inoda simba rekudzivirira kupisa, insulation yemagetsi, uye kugadzikana kwekupisa kusvika 1600°C. Kugona kwedu kugadzira kunotsigira dhayamita dzekunze kusvika 600mm, ukobvu hunosvika 100mm, uye dhayamita dzemukati diki kusvika 0.2mm, ine hurefu hwe 0.003mm, parallelism ye 0.002mm, uye concentricity ye 0.01mm. Inowanikwa se seal rings, spacer rings, retaining rings, kana custom profiles. Zero porosity yechinhu ichi uye chemical inertness inoita kuti ive yakakodzera kune aggressive chemicals and plasma environments.
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High-Purity Alumina Ceramic Tube yenzvimbo dzinopisa zvakanyanya uye dzinoparadza
Chubhu yeSt.Cera yakagadzirwa ne99.8% high-purity alumina (Al₂O₃), inopa kugadzikana kwakanaka kwekupisa kusvika 1600°C, simba repamusoro re dielectric (15×10⁶ V/m), uye kuramba kwemakemikari kwakanyanya. Kugona kwedu kugadzira nemazvo kunogonesa dhayamita dzemukati diki se0.2mm, dhayamita dzekunze kusvika 600mm, uye kureba kusvika 1500mm, nekutwasuka kwe 0.005mm, kuzara kwe 0.01mm, uye kupenya kwepamusoro kwe Ra0.1. Chubhu iyi haina kunyura (0% mvura inonyudzwa) inodzivirira kubuda kwegasi munzvimbo dzevacuum, zvichiita kuti ive yakanaka kune maoven e semiconductor diffusion, dziviriro ye thermocouple, uye kugadziriswa kwemakemikari. Hukobvu hwemadziro akagadzirwa uye magadzirirwo ekupedzisira (akatsetseka, akapfava, akaputirwa) zviripo.
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Zvikamu zveCeramic zveAlumina zveSemiconductor & Industrial Equipment
St.Cera inogadzira zvikamu zveceramic zvakagadzirwa ne99.8% high-purity alumina (Al₂O₃) zvichienderana nemifananidzo yevatengi. Nzvimbo yedu ine michina yekukuya nemazvo uye nzvimbo dzekugadzira dzeCNC, zvichiita kuti zvigadzirwa zveceramic zvive zvakaoma uye zvakanyatsonaka. Zvikamu zvakajairika zvinosanganisira ma insulators, ma bearing balls, seal rings, bushings, custom fixtures, uye complex geometries. Kugona kwedu kugadzira kunotsigira
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Alumina Ceramic Nozzle yeKupinza Gasi/Mafuta Pakupisa Kwakanyanya
Nozzle yeSt.Cera yakagadzirwa nemazvo kubva pa99.8% high-purity alumina (Al₂O₃), ichipa resistance yakanyanya (Vickers 16 GPa), ine chemical inertness, uye tembiricha yakasimba kusvika 1600°C. Kugona kwedu kugadzira nemazvo kunoita kuti dhayamita yemukati ive diki se0.2mm, ine straightness ye0.005mm uye concentricity ye0.01mm, zvichiita kuti kuyerera kuenderane uye kupararira kwemvura/gasi kwakanyatsojeka. Nozzle iyi ine bhora remukati rakatsetseka rine surface finish Ra0.1, inoderedza resistance yekuyerera uye inoderedza kuvharika. Orifice diameters kubva pa0.2mm kusvika pa5.0mm, ine ma geometries akagadzirwa anosanganisira ma outlets akatwasuka, akatetepa, kana akawanda-orifice. Nozzle yega yega inoongororwa nehukuru uye inoongororwa kuti inoyerera zvakaenzana here.
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High-Purity Alumina Ceramic Grinding Plate yePrecision Lapping
Pureti yekukuya yeSt.Cera yakagadzirwa ne99.8% high-purity alumina (Al₂O₃) yekushandisa pakukwesha nekukwesha nemazvo. Kugona kwedu kukwesha nemazvo kunoita kuti 0.003mm isatsvedzerere, 0.002mm iite seyakafanana, uye 0.002mm iite seyakafanana, uye 0.1 inenge yave pamusoro pepureti. Pureti iyi ine simba rekudzivirira kukwesha (Vickers 16 GPa), flexural strength (361 MPa), uye thermal stability inosvika 800°C. Inowanikwa muchimiro chedenderedzwa kusvika 600mm dhayamita uye rectangular plates kusvika 1500mm kureba. Nzvimbo dzine grooved (groove wide 0.5–2.0mm) dzinowanikwa kuti dzigoverwe mu lapping process. Pureti yega yega inoongororwa ne laser interferometer uye inopihwa mushumo wekuyera nemazvo.
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Alumina Ceramic End Effector Yakachena Kwazvo yeWafer Handling Robots
St.Cera's alumina ceramic end effector yakagadzirwa nemazvo kubva pa99.8% high-purity Al₂O₃ tichishandisa michina yepamusoro ye 5-axis CNC grinding. Hunhu hwedu hwekugadzira hunosanganisira michina yekukuya nemazvo nenzvimbo dzeCNC machining, zvichiita kuti ma geometries akaomarara ave nemazvo. End effector ine profile yakatetepa (yakatetepa se1.5 mm) ine leading edge yakatetepa yekuisa wafer yakatsetseka. Zvinhu izvi zvinopa kuomarara kwakanyanya (Young's modulus 380 GPa), kuramba kupfeka zvakanaka, uye kugadzikana kwekupisa kusvika 800°C. Unit yega yega inogayiwa nemazvo kuti ive flatness ye 0.003mm, parallelism ye 0.002mm, uye surface finish ye Ra0.1, zvichiita kuti wafer ibatane zvakanaka uye ishande isina particles munzvimbo dze semiconductor FAB. Inowanikwa muhurefu kubva pa 150 mm kusvika 450 mm, ine custom tip geometries (edge grip, Bernoulli, flat) uye mounting flanges kuti ikwane maOEM robots. Sarudzo dzekupedzisa pamusoro dzinosanganisira kuputira kwakarukwa, kwakaporishwa, kana kuti ESD dissipative (10⁶–10⁹Ω/sq).
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Alumina Vacuum Chuck yekuchenesa nekukuya nemazvo
Chigadziko chevacuum cheSt.Cera chealumina chakagadzirwa ne99.8% cheAl₂O₃ chakachena zvikuru chine magirovhosi evacuum akagadzirwa nemazvo. Kugona kwedu kugaya nemazvo kunoita kuti chive chakatsetseka che0.003mm uye chive chakafanana che0.002mm, zvichiita kuti chive chakasimba chisina warp panguva yekucheka, kugaya kumashure, uye kuongorora. Chigadzirwa ichi chine simba rakakwira (361 MPa), kuomarara (16 GPa), uye kugadzikana kwekupisa kusvika 800°C. Chinowanikwa mumafomu akatenderera anosvika 600mm dhayamita yekunze (OD) uye maumbirwo erectangular anosvika 1500mm kureba. Magirovhosi evacuum akagadzirwa nenzira yakasarudzika (concentric, radial, kana grid patterns) kuti akwane zvinodiwa pakuita basa. Chuck yega yega inoongororwa ne laser interferometer uye inopihwa mushumo wekusimbisa kuti chive chakadzikama.
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SiC Vacuum Chuck ine Porous ine Metal-Backed yekubata Wafer yakakombama uye yakatetepa
Chigadziko cheSt.Cera chesimbi chinobatanidza ceramic chakagadzirwa nesimbi chinobatanidza silicon carbide (SiC) ceramic layer ine maburi nesimbi yakagadzirwa nemazvo (aluminium kana simbi isina ngura). Chigadziko cheSiC chine maburi (bhuruu-dema, maburi 35–40%, saizi yemaburi 20–30 μm, permeability 60 ml/cm²·min) chinopa kugoverwa kwakafanana, kwakapfava kwevacuum pamusoro pewafer yese, zvichibvisa kunyorwa kwemucheto uye zvichibvumira rutsigiro rusina kubatana rwemawafer matete (≤100 μm) kana akakombama. Chigadziko cheSiC chinopa kuwedzera kwekupisa kwakaderera (3.5×10⁻⁶/℃), kugadzikana kwekupisa kusvika 1000°C, uye simba reflexural riri pakati nepakati (32–35 MPa). Chigadziko chesimbi chinowedzera kuomarara kwechimiro, nyore kuisa kuburikidza nemaburi ane shinda, uye dziviriro kubva pakuputsika kwebrittle. Chigadziko ichi chakanakira kukuya, kuchekerera, uye kugadzirisa wafer ine tembiricha yepamusoro uko vacuum yakafanana uye thermal compatibility zvakakosha.
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Plate yeAlumina Ceramic Yakachena Zvikuru – Yekudzivirira Kupisa & Kupisa Kwakanyanya
Purati yeSt.Cera yakagadzirwa ne99.8% alumina (Al₂O₃), ine simba re dielectric rakakwirira (15×10⁶ V/m), kugadzikana kwekupisa kusvika 1600°C, uye kuramba kupfeka zvakanaka. Mapurati akagadzirwa nemazvo kuti asvike pakutsetseka ≤5 μm pamusoro pe100 mm uye kushata kwepamusoro Ra ≤0.4 μm. Inowanikwa muukobvu hwakajairwa kubva pa1 mm kusvika 20 mm, saizi dzakagadzirwa dzinosvika 500×500 mm. Inoshandiswa sezvinodzivirira magetsi, ma heater bases, chamber liners, uye vacuum chuck substrates.
