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Metal-Backed Porous SiC Vacuum Chuck for Warped & Thin Wafer Handling
St.Cera’s metal based ceramic vacuum chuck combines a porous silicon carbide (SiC) ceramic layer with a precision-machined metal base (aluminum or stainless steel). The porous SiC material (blue-black, porosity 35–40%, pore size 20–30 μm, permeability 60 ml/cm²·min) provides uniform, gentle vacuum distribution across the entire wafer surface, eliminating edge marking and enabling non-contact support for thin (≤100 μm) or warped wafers. The SiC layer offers low thermal expansion (3.5×10⁻⁶/℃), thermal stability up to 1000°C, and moderate flexural strength (32–35 MPa). The metal base adds structural rigidity, easy mounting via threaded holes, and protection against brittle fracture. This chuck is ideal for backside grinding, dicing, and high-temperature wafer processing where uniform vacuum and thermal compatibility are critical.
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High-Purity Alumina Ceramic Plate – for Insulation & High-Temperature Fixtures
St.Cera’s ceramic plate is manufactured from 99.8% high-purity alumina (Al₂O₃), offering high dielectric strength (15×10⁶ V/m), thermal stability up to 1600°C, and excellent wear resistance. Plates are precision lapped to achieve flatness ≤5 μm over 100 mm and surface roughness Ra ≤0.4 μm. Available in standard thicknesses from 1 mm to 20 mm, custom sizes up to 500×500 mm. Used as electrical insulators, heater bases, chamber liners, and vacuum chuck substrates.
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Precision Alumina Ceramic Location Rod for Semiconductor Fixtures
St.Cera’s ceramic location rod is precision ground from 99.8% high-purity alumina (Al₂O₃). It provides high hardness (16 GPa), excellent wear resistance, and dimensional stability. Diameter tolerances as tight as ±0.005 mm, length up to 150 mm. The rod surface is lapped to Ra ≤0.2 μm for smooth insertion and removal. Used as alignment pins, dowel pins, or positioning stops in semiconductor process fixtures, wafer cassettes, and inspection equipment.
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High-Strength Zirconia Ceramic Rod – for Precision Shafts & Punches
St.Cera’s zirconia ceramic rod is precision ground from yttria-stabilized ZrO₂. It offers exceptional flexural strength (1000 MPa), fracture toughness (5–8 MPa·m¹/²), and Vickers hardness (13 GPa). The rod has a black or white appearance, density 6.03 g/cm³, and zero porosity. Diameters from 1 mm to 50 mm, length up to 200 mm, with tolerance as tight as ±0.005 mm. Surface finish lapped to Ra ≤0.2 μm. Ideal for high-wear applications such as plungers, shafts, dowel pins, and cutting tool blanks.
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Yttria-Stabilized Zirconia Ceramic Parts – High Toughness & Wear Resistance
St.Cera manufactures custom zirconia ceramic parts using yttria-stabilized ZrO₂ (Y-TZP). This material offers exceptional flexural strength (1000 MPa), high fracture toughness (5–8 MPa·m¹/²), and Vickers hardness of 13 GPa. Density is 6.03 g/cm³, with zero water absorption. Parts can be supplied in white or black color. Zirconia’s unique transformation toughening mechanism provides excellent resistance to crack propagation, making it ideal for components subject to impact, thermal shock, or high stress. Typical parts include valve seats, pump plungers, fiber guide pins, cutting tools, and wear-resistant bushings.
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ST.CERA Customized 99.5% Alumina Ceramic parts
Ceramic structural parts is a general term of various complicated shapes of ceramic parts. Be made of high-purity ceramic powder, the ceramic parts is formed by dry pressing or cold isostatic pressing, and sintered under high temperature, then precision machined. It is widely used in semiconductor equipment, optical communication, laser, medical equipment, petroleum, metallurgy, electronics industries with its features like high temperature resistance, corrosion resistance, abrasion resistance and insulation.
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ST.CERA Customized 99.5% Alumina Ceramic parts
Ceramic structural parts is a general term of various complicated shapes of ceramic parts. It is widely used in semiconductor equipment, optical communication, laser, medical equipment, petroleum, metallurgy, electronics industries with its features like high temperature resistance, corrosion resistance, abrasion resistance and insulation.
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ST.CERA Customized AlN ceramic plates ceramic parts
Ceramic structural parts is a general term of various complicated shapes of ceramic parts. Be made of high-purity ceramic powder, the ceramic parts is formed by dry pressing or cold isostatic pressing, and sintered under high temperature, then precision machined. It is widely used in semiconductor equipment, optical communication, laser, medical equipment, petroleum, metallurgy, electronics industries.
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ST.CERA Customized zirconia ceramic plates ceramic parts
Ceramic structural parts is a general term of various complicated shapes of ceramic parts. It is formed by dry pressing or cold isostatic pressing, and sintered under high temperature, then precision machined.
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ST.CERA Customized Alumina Ceramic Bernoulli end effector
As a leading manufacturer of ceramic End Effector / Handling Arm, we have developed an unconventional End Effector / Handling Arm that responds to that market’s needs. Bernoulli’s Principle-based ceramic End Effector / Handling Arm which can levitate and transport the wafer via airflow with minimal peripheral contact.
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ST.CERA Customized ESD Ceramic end effector
With features of high temperature resistance, corrosion resistance, abrasion resistance and insulation, ceramic can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time
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ST.CERA Customized Alumina Ceramic gripping end effector
With features of high temperature resistance, corrosion resistance, abrasion resistance and insulation, ceramic can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time.
