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Alumina PVD Insulation Ring for Physical Vapor Deposition Systems
St.Cera’s PVD insulation ring is manufactured from 99.8% high-purity alumina (Al₂O₃) for use in physical vapor deposition (PVD) systems. The ring provides electrical isolation between chamber components, preventing arcing and ensuring stable plasma operation. Key properties include high dielectric strength (15×10⁶ V/m), specific resistance >10¹⁴ Ω·mm²/m, and thermal stability up to 1600°C. Our precision machining capabilities achieve outer diameters up to 600mm, inner diameters down to 0.2mm, flatness of 0.003mm, and surface finish Ra0.1. The ring’s zero porosity and chemical inertness ensure long-term reliability in aggressive sputtering environments.
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Alumina Ceramic Parts for E-Gun Evaporation Systems
St.Cera manufactures high-purity 99.8% alumina ceramic components specifically designed for electron beam (E-gun) evaporation systems. These parts include crucible liners, beam deflector shields, insulators, and mounting fixtures. The material offers high dielectric strength (15×10⁶ V/m), thermal stability up to 1600°C, and excellent resistance to thermal shock and chemical attack from evaporated materials. Our precision machining capabilities achieve complex geometries with minimum feature size 0.2mm, flatness 0.003mm, and surface finish Ra0.1. Each part is 100% CMM inspected for dimensional accuracy.
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ST.CERA Customized 99.5% Alumina Ceramic parts
Ceramic structural parts is a general term of various complicated shapes of ceramic parts. Be made of high-purity ceramic powder, the ceramic parts is formed by dry pressing or cold isostatic pressing, and sintered under high temperature, then precision machined. It is widely used in semiconductor equipment, optical communication, laser, medical equipment, petroleum, metallurgy, electronics industries with its features like high temperature resistance, corrosion resistance, abrasion resistance and insulation.
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ST.CERA Customized 99.5% Alumina Ceramic Loader Arm
Ceramic End Effector / Handling Arm is installed on wafer handling robot or “end effectors” and used to carry silicon wafers into or out of cassettes or process chambers.
The benefits of using ceramics are reduction of deflection due to high flexural strength, resistance to high temperatures, and elimination of metal contamination and particles. -
ST.CERA Customized 99.5% Alumina Ceramic Components
Be made of high-purity ceramic powder, the ceramic components is formed by dry pressing or cold isostatic pressing, and sintered under high temperature, then precision machined. It is widely used in semiconductor equipment, optical communication, laser, medical equipment, petroleum, metallurgy, electronics industries with its features like high temperature resistance, corrosion resistance, abrasion resistance and insulation.
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Precision Ceramic Alumina Ceramic Wafer Handling Arm Semiconductor Ceramics
With features of high temperature resistance, corrosion resistance, abrasion resistance and insulation, ceramic can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time.
Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃.
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Insulated Alumina Ceramic Arm Semiconductor Equipment Components
Prevent the particles that can generate from the bevel or angled edges and the back surface while wafers are transported or being in contact with End Effector / Handling Arm.
For the guides, adopted a soft material that does not damage the wafer.
Thinning is possible with ST.CERA’s built-in vacuum channel technology that does not use adhesives.
Possible to make mounting holes and to change the length and width of the base where the End Effector / Handling Arm is mounted on the robot.
Mounting sensors, screws and brackets is available as an option.
Designed to be used in atmosphere
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High Temperature Resistance of Precision Ceramic Alumina Ceramics
Be made of high-purity ceramic powder, the ceramic tube is formed by dry pressing or cold isostatic pressing, and sintered under high temperature, then precision machined. With many advantages like abrasion resistance, corrosion resistance, high hardness, high toughness and low friction coefficient, it is widely used in medical equipment, precision machinery, laser, metrology and inspection equipment. It can work in the conditions of acid and alkali for a long time, and the maximum temperature can up to 1600℃.
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High Pressure and Wear-Resistant Alumina Ceramic Rod Ceramic Plunger
Be made of high-purity ceramic powder, the ceramic rod is formed by dry pressing or cold isostatic pressing, and sintered under high temperature, then precision machined. With many advantages like abrasion resistance, corrosion resistance, high hardness, high toughness and low friction coefficient, it is widely used in medical equipment, precision machinery, laser, metrology and inspection equipment. It can work in the conditions of acid and alkali for a long time, and the maximum temperature can up to 1600℃.
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Alumina Ceramic Shaft Sleeve Ceramic Plunger
Be made of high-purity ceramic powder, the ceramic rod is formed by dry pressing or cold isostatic pressing, sintered under high temperature, then precision machined. With many advantages like abrasion resistance, corrosion resistance, high hardness, high toughness and low friction coefficient, it is widely used in medical equipment, precision machinery, laser, metrology and inspection equipment. It can work in the conditions of acid and alkali for a long time, and the maximum temperature can up to 1600℃. The ceramic materials we usually use are Zirconia, 95% ~ 99.9% Alumina (Al2O3), Silicon Nitride (Si3N4), Aluminum Nitride (AlN) and so on.
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Excellent Performance of Alumina Ceramic Mechanical Structural Parts
Ceramic structural parts is a general term of various complicated shapes of ceramic parts. Be made of high-purity ceramic powder, the ceramic parts is formed by dry pressing or cold isostatic pressing, and sintered under high temperature, then precision machined. It is widely used in semiconductor equipment, optical communication, laser, medical equipment, petroleum, metallurgy, electronics industries.
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Alumina Ceramic Structural Components Structural Parts
Ceramic structural parts is a general term of various complicated shapes of ceramic parts. It is formed by dry pressing or cold isostatic pressing, and sintered under high temperature, then precision machined.
Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 400℃~800℃.
