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Alumina Ceramic Parts for E-Gun Evaporation Systems

Alumina Ceramic Parts for E-Gun Evaporation Systems

Short Description:

St.Cera manufactures high-purity 99.8% alumina ceramic components specifically designed for electron beam (E-gun) evaporation systems. These parts include crucible liners, beam deflector shields, insulators, and mounting fixtures. The material offers high dielectric strength (15×10⁶ V/m), thermal stability up to 1600°C, and excellent resistance to thermal shock and chemical attack from evaporated materials. Our precision machining capabilities achieve complex geometries with minimum feature size 0.2mm, flatness 0.003mm, and surface finish Ra0.1. Each part is 100% CMM inspected for dimensional accuracy.


Product Detail

Product Tags

St.Cera manufactures high-purity 99.8% alumina ceramic components specifically designed for electron beam (E-gun) evaporation systems. These parts include crucible liners, beam deflector shields, insulators, and mounting fixtures. The material offers high dielectric strength (15×10⁶ V/m), thermal stability up to 1600°C, and excellent resistance to thermal shock and chemical attack from evaporated materials. Our precision machining capabilities achieve complex geometries with minimum feature size 0.2mm, flatness 0.003mm, and surface finish Ra0.1. Each part is 100% CMM inspected for dimensional accuracy.

 

Specifications (based on 99.8% AlO & St.Cera manufacturing capabilities):

Property Value
Material 99.8% Alumina (Ivory)
Density 3.93 g/cm³
Flexural Strength 361 MPa
Vickers Hardness 16 GPa
Dielectric Strength 15×10⁶ V/m
Specific Resistance >10¹⁴ Ω·mm²/m
Max Length/Width 1500mm
Max Outer Diameter 600mm
Min Feature Size 0.2mm
Flatness 0.003mm
Surface Finish Ra0.1
Max Operating Temp 1600°C

 

Applications:

  • · E-gun crucible liners and evaporation boats
  • · Beam deflector shields and aperture plates
  • · Electrical insulators and feedthroughs
  • · Mounting fixtures for evaporation sources

 

Manufacturing Precision:

Straightness: 0.005mm, perpendicularity: 0.005mm, roundness: 0.002mm, concentricity: 0.01mm.

 

Advantages:

  • · No contamination of thin films from crucible materials
  • · Withstands high thermal gradients during evaporation
  • · Long service life – 5× longer than graphite alternatives

 

Customization:

Custom crucible cavity shapes, mounting flanges, hole patterns, and surface finishes available.


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