Large-Format Alumina Ceramic Plate for Semiconductor & Industrial Fixtures
St.Cera manufactures large-format ceramic plates from 99.8% high-purity alumina (Al₂O₃) with maximum dimensions up to 1500mm in length and 600mm in width. Our precision grinding capabilities achieve flatness of 0.003mm over 100mm and parallelism of 0.002mm, ensuring consistent surface quality for large-area applications. Thickness up to 100mm, surface finish down to Ra0.1. These plates serve as vacuum chuck bases, heater platens, electrical insulation panels, and process chamber floors in semiconductor, display, and photovoltaic manufacturing. Through-holes, counterbores, and edge profiling available.
Specifications (based on 99.8% Al₂O₃ & St.Cera manufacturing capabilities):
| Property | Value |
| Material | 99.8% Alumina (Ivory) |
| Density | 3.93 g/cm³ |
| Flexural Strength | 361 MPa |
| Vickers Hardness | 16 GPa |
| Dielectric Strength | 15×10⁶ V/m |
| Max Length | 1500mm |
| Max Width | 600mm |
| Max Thickness | 100mm |
| Flatness (per 100mm) | 0.003mm |
| Parallelism | 0.002mm |
| Surface Finish | Ra0.1 (lapped/polished) |
| Max Operating Temp | 1600°C |
Applications:
- · Vacuum chuck base plates for large wafers and panels
- · Heater platens for thermal processing equipment
- · Electrical insulation panels in high-voltage systems
- · Process chamber floors and liner plates
Manufacturing Precision:
Straightness: 0.005mm, perpendicularity: 0.005mm, verified with laser interferometer.
Advantages over Metal Plates:
- · No metallic contamination – critical for semiconductor processes
- · Zero outgassing – ideal for vacuum environments
- · Superior wear and chemical resistance
Customization:
Custom hole patterns, edge profiles, stepped surfaces, and metallized mounting areas available.
