High-Purity Alumina Ceramic Core for Semiconductor Fixtures
St.Cera’s alumina ceramic core is precision formed from 99.8% high-purity Al₂O₃, offering exceptional dielectric strength (15×10⁶ V/m), thermal stability up to 1600°C, and creep resistance under load. These cores are used as structural components in high-temperature process fixtures, heater bases, plasma chamber liners, and electrical insulators. The material’s high hardness (16 GPa) and low water absorption (0%) ensure long-term reliability in harsh environments.
Specifications (based on 99.8% Al₂O₃):
| Property | Value |
| Material | 99.8% Alumina (Ivory) |
| Density | 3.93 g/cm³ |
| Flexural Strength | 361 MPa |
| Fracture Toughness | 3–4 MPa·m¹/² |
| Vickers Hardness | 16 GPa |
| Young’s Modulus | 380 GPa |
| Thermal Conductivity | 32 W/m·k |
| Thermal Expansion (25-1000°C) | 7.2×10⁻⁶/℃ |
| Dielectric Strength | 15×10⁶ V/m |
| Specific Resistance | >10¹⁴ Ω·mm²/m |
| Max Operating Temp | 1600°C |
Applications:
- · Heater core for epitaxial reactors
- · Plasma chamber liner and cover plates
- · High-voltage electrical insulators
- · Fixture base for wafer handling robots
Manufacturing:
Isostatic pressing → green machining → sintering at 1600°C → CNC grinding to final dimensions (±0.01 mm tolerance). Each core is inspected by CMM and ultrasonic flaw detection.
Quality Assurance:
ISO 9001:2015 certified. Dye penetrant testing for surface cracks; dielectric strength test per ASTM D149.
Advantages over other ceramics:
- · Higher dielectric strength than zirconia (15 vs <10×10⁶ V/m)
- · Lower cost than SiC for non-plasma applications
- · Excellent chemical resistance to halogens (except HF)
Custom Shapes:
Cylinders, square bars, plates, or complex geometries. Minimum feature size 0.5 mm.
Contact us for custom core designs and thermal simulation support.
