Alumina PVD Insulation Ring for Physical Vapor Deposition Systems
St.Cera’s PVD insulation ring is manufactured from 99.8% high-purity alumina (Al₂O₃) for use in physical vapor deposition (PVD) systems. The ring provides electrical isolation between chamber components, preventing arcing and ensuring stable plasma operation. Key properties include high dielectric strength (15×10⁶ V/m), specific resistance >10¹⁴ Ω·mm²/m, and thermal stability up to 1600°C. Our precision machining capabilities achieve outer diameters up to 600mm, inner diameters down to 0.2mm, flatness of 0.003mm, and surface finish Ra0.1. The ring’s zero porosity and chemical inertness ensure long-term reliability in aggressive sputtering environments.
Specifications (based on 99.8% Al₂O₃ & St.Cera manufacturing capabilities):
| Property | Value |
| Material | 99.8% Alumina (Ivory) |
| Density | 3.93 g/cm³ |
| Flexural Strength | 361 MPa |
| Vickers Hardness | 16 GPa |
| Dielectric Strength | 15×10⁶ V/m |
| Specific Resistance | >10¹⁴ Ω·mm²/m |
| Max Outer Diameter | 600mm |
| Min Inner Diameter | 0.2mm |
| Max Thickness | 100mm |
| Flatness | 0.003mm |
| Parallelism | 0.002mm |
| Surface Finish | Ra0.1 |
| Max Operating Temp | 1600°C |
Applications:
- · Target backing plate insulators in PVD systems
- · Chamber feedthrough insulators
- · Shield ring insulators in sputtering systems
- · High-voltage isolation in plasma chambers
Manufacturing Precision:
Concentricity: 0.01mm, roundness: 0.002mm, straightness: 0.005mm, perpendicularity: 0.005mm, verified by CMM.
Advantages over Polymer Insulators:
- · Withstands 1600°C vs polymer’s <300°C limit
- · No outgassing – maintains vacuum integrity
- · Resists plasma erosion and chemical attack
Customization:
Custom cross-sections, mounting features, step profiles, and multiple concentric ring designs available.
