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ST.CERA Custom High-Precision Semiconductor Equipment Ceramic Chuck
Formed by cold isostatic pressing and sintered under high temperature, then precision machined and polished, the ceramic spare parts can meet any strict requirements of semiconductor equipment with its features of wear resistance, corrosion resistance, low thermal expansion, and insulation. Ceramics can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time.
Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃.
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Alumina Ceramic discs with High Purity
Formed by cold isostatic pressing and sintered under high temperature, then precision machined and polished, the ceramic spare parts can meet any strict requirements of semiconductor equipment with its features of wear resistance, corrosion resistance, low thermal expansion, and insulation. Ceramics can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time.
Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃.
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ST.CERA Customized Semiconductor Equipment Ceramic Chucks
Formed by cold isostatic pressing and sintered under high temperature, then precision machined and polished, the ceramic spare parts can meet any strict requirements of semiconductor equipment with its features of wear resistance, corrosion resistance, low thermal expansion, and insulation. Ceramics can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time.
Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃.
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Ceramic Spare Parts for Semiconductor Probe Equipment
Formed by cold isostatic pressing and sintered under high temperature, then precision machined and polished, the ceramic spare parts can meet any strict requirements of semiconductor equipment with its features of wear resistance, corrosion resistance, low thermal expansion, and insulation. Ceramics can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time.
Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃.
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High-Purity Alumina Ceramic Parts for Semiconductor & Industrial Applications
St.Cera manufactures precision-machined alumina (Al₂O₃) ceramic parts to customer specifications. Using 99.8% high-purity alumina, these components deliver excellent flexural strength (361 MPa), high hardness (16 GPa), and outstanding dielectric strength (15×10⁶ V/m). Designed for semiconductor equipment, wear-resistant assemblies, electrical insulators, and high-temperature fixtures, the material offers near-zero water absorption (0%) and a thermal expansion coefficient of 7.2×10⁻⁶/℃, ensuring dimensional stability under extreme conditions.
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Ceramic Supporting Pin for Semiconductor Process Fixtures
St.Cera’s ceramic supporting pins (also known as lift pins or support pins) are used in semiconductor process chambers to elevate wafers or substrates during handling, heating, or cooling. Manufactured from 99.8% alumina or silicon nitride, these pins offer high compressive strength, thermal stability, and chemical resistance. The hemispherical or flat tip design prevents wafer scratching.
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High-Purity Alumina Ceramic Core for Semiconductor Fixtures
St.Cera’s alumina ceramic core is precision formed from 99.8% high-purity Al₂O₃, offering exceptional dielectric strength (15×10⁶ V/m), thermal stability up to 1600°C, and creep resistance under load. These cores are used as structural components in high-temperature process fixtures, heater bases, plasma chamber liners, and electrical insulators. The material’s high hardness (16 GPa) and low water absorption (0%) ensure long-term reliability in harsh environments.
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ST.CERA Customized for Alumina Ceramic Ring and Ceramic Disc
Formed by cold isostatic pressing and sintered under high temperature, then precision machined and polished, the ceramic spare parts can meet any strict requirements of semiconductor equipment with its features of wear resistance, corrosion resistance, low thermal expansion, and insulation. Ceramics can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time.
Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃.
