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High-Purity Alumina Ceramic Parts for Semiconductor & Industrial Applications

High-Purity Alumina Ceramic Parts for Semiconductor & Industrial Applications

Short Description:

St.Cera manufactures precision-machined alumina (Al₂O₃) ceramic parts to customer specifications. Using 99.8% high-purity alumina, these components deliver excellent flexural strength (361 MPa), high hardness (16 GPa), and outstanding dielectric strength (15×10⁶ V/m). Designed for semiconductor equipment, wear-resistant assemblies, electrical insulators, and high-temperature fixtures, the material offers near-zero water absorption (0%) and a thermal expansion coefficient of 7.2×10⁻⁶/℃, ensuring dimensional stability under extreme conditions.


Product Detail

Product Tags

St.Cera manufactures precision-machined alumina (Al₂O₃) ceramic parts to customer specifications. Using 99.8% high-purity alumina, these components deliver excellent flexural strength (361 MPa), high hardness (16 GPa), and outstanding dielectric strength (15×10⁶ V/m). Designed for semiconductor equipment, wear-resistant assemblies, electrical insulators, and high-temperature fixtures, the material offers near-zero water absorption (0%) and a thermal expansion coefficient of 7.2×10⁻⁶/℃, ensuring dimensional stability under extreme conditions.

 

Specifications (based on 99.8% AlO):


Property
Value
Material 99.8% Alumina (Ivory)
Density 3.93 g/cm³
Flexural Strength 361 MPa
Fracture Toughness 3–4 MPa·m¹/²
Vickers Hardness 16 GPa
Young‘s Modulus 380 GPa
Thermal Conductivity 32 W/m·k
Thermal Expansion (25–1000°C) 7.2×10⁻⁶/℃
Dielectric Constant 9.6
Dielectric Loss Angle 0.0001
Dielectric Strength 15×10⁶ V/m
Specific Resistance >10¹⁴ Ω·cm
Max Operating Temperature 1600°C

 

Applications:

  • · Semiconductor process chamber liners, viewports, and gas distribution plates
  • · Wear-resistant bushings, seal rings, and bearing balls
  • · High-voltage electrical insulators and spark plug insulators
  • · Furnace fixtures, heater supports, and thermocouple protection tubes

 

Manufacturing Process:

Isostatic pressing → green machining → sintering at 1600°C → CNC precision grinding / lapping → ultrasonic cleaning → 100% CMM dimensional inspection. Complex geometries, thin walls (≥0.5 mm), and tight tolerances (down to ±0.01 mm) are routinely achieved.

Quality Control:
ISO 9001:2015 certified. Each batch is tested for flexural strength (3point bend), hardness (Vickers), dielectric strength (ASTM D149), and thermal shock resistance (10 cycles, 25°C ↔ 1000°C). No cracks or chips visible under 20× microscopy.

 

Advantages over Metal or Polymer Parts:

  • · 3–5× harder than stainless steel (16 GPa vs. ~2 GPa)
  • · Chemically inert — resistant to acids, alkalis, and halogens (except HF)
  • · Electrical insulator >10¹⁴ Ω·cm, enabling use in high-voltage environments
  • · Continuous service up to 1600°C, far exceeding the limits of metals or plastics

 

Customization:

We accept customer drawings (STEP/IGS format) and offer rapid prototyping (2–3 weeks). Parts can be supplied assintered, ground, lapped, or polished (Ra ≤0.05 μm). Edge rounding, counterbores, threaded holes, and vacuum grooves are available.

 

Note: For applications requiring higher fracture toughness, consider zirconia (ZrO₂) parts. For highest thermal conductivity, refer to our BeO or Si₃N₄ products. All data above strictly follows the supplied Al₂O₃ property table (99.8% grade).


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