Ceramic Supporting Pin for Semiconductor Process Fixtures
St.Cera’s ceramic supporting pins (also known as lift pins or support pins) are used in semiconductor process chambers to elevate wafers or substrates during handling, heating, or cooling. Manufactured from 99.8% alumina or silicon nitride, these pins offer high compressive strength, thermal stability, and chemical resistance. The hemispherical or flat tip design prevents wafer scratching.
Specifications (Alumina 99.8%):
| Property | Value |
| Material | 99.8% Al₂O₃ or Si₃N₄ |
| Length | 10 – 100 mm |
| Diameter | 1 – 10 mm |
| Tip Shape | Flat, hemispherical, pointed |
| Compressive Strength (Al₂O₃) | >2000 MPa |
| Max Operating Temp (Al₂O₃) | 1600°C |
| Surface Finish | Lapped (Ra ≤0.4 μm) |
| Tolerance on Diameter | ±0.01 mm |
Applications:
Lift pins in CVD/PVD chambers
Support pins for hotplate baking
Probe card support structures
Quartz furnace boat supports
Manufacturing:
Precision centerless grinding of OD → diamond grinding of tip profile → ultrasonic cleaning → 100% dimensional inspection.
Quality Control:
CMM for length/diameter, optical comparator for tip radius, load testing to verify compressive strength (random sample per lot). No ferromagnetic contamination (verified with magnet).
Advantages over Metal or Quartz Pins:
5x longer lifetime than stainless steel
No metal contamination in process chamber
Higher temperature capability than quartz (1600°C vs 1100°C)
Non-stick surface (reduced particle adhesion)
Customization:
Multiple tip profiles, threaded base, or tapered shaft.
We also supply SiC pins for extreme plasma environments.
