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ST.CERA Customized semiconductor equipment Ceramic chucks
The critical process of semiconductor field requires to be done in cleanroom, especially for those devices should be used under conditions of high temperature, vacuum and corrosive gas. Ceramics can keep high stability in complicated physical and chemical environment.
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ST.CERA Customized semiconductor equipment Ceramic plate
The critical process of semiconductor field require to be done in cleanroom, especially for those devices should be used under conditions of high temperature, vacuum and corrosive gas. Ceramics can keep high stability in complicated physical and chemical environment.
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ST.CERA Customized semiconductor Ceramic focus ring
The critical process of semiconductor field requires to be done in cleanroom, especially for those devices should be used under conditions of high temperature, vacuum and corrosive gas. Ceramics can keep high stability in complicated physical and chemical environment.
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ST.CERA Customized 99.5% Alumina Ceramic Loader Arm
Ceramic End Effector / Handling Arm is installed on wafer handling robot or “end effectors” and used to carry silicon wafers into or out of cassettes or process chambers.
The benefits of using ceramics are reduction of deflection due to high flexural strength, resistance to high temperatures, and elimination of metal contamination and particles. -
ST.CERA Customized Alumina Ceramic End Effector
ST.CERA offers ESD coating and ESD ceramic material End Effector Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃.
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ST.CERA Customized Semiconductor Ceramic Focus Ring
Be made of high-purity (above 99.5%) alumina ceramic, formed by cold isostatic pressing and sintered under high temperature, then precision machined and polished, the ceramic spare parts can meet any strict requirements of semiconductor equipment with its features of wear resistance, corrosion resistance, low thermal expansion, and insulation.
With features of high temperature resistance, corrosion resistance, abrasion resistance and insulation, ceramic can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time.
Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃.
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ST.CERA Customized Semiconductor Precision Alumina Ceramic Bushing
Be made of high-purity (above 99.5%) alumina ceramic, formed by cold isostatic pressing and sintered under high temperature, then precision machined and polished, the ceramic spare parts can meet any strict requirements of semiconductor equipment with its features of wear resistance, corrosion resistance, low thermal expansion, and insulation.
With features of high temperature resistance, corrosion resistance, abrasion resistance and insulation, ceramic can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time.
Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃.
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ST.CERA Customized Alumina Ceramic Vacuum End Effector
This is a tray-type ceramic End Effector / Handling Arm used under a vacuum condition.
Ceramic End Effector / Handling Arm is “more heat-resistant”, “less deflective”, and “lighter” in weight as compared to the metal ones.
With features of high temperature resistance, corrosion resistance, abrasion resistance and insulation, ceramic can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time.
Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃.
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ST.CERA Customized 99.5% Alumina Ceramic Tubes and Ceramic Rods
With features of high temperature resistance, corrosion resistance, abrasion resistance and insulation, ceramic can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time.
Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃.
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ST.CERA Customized Alumina Ceramic End Effector Wafer Handling
ST.CERA offers ESD coating and ESD ceramic material End Effector / Handling Arm with a built-in hollow channel. We specialize in a technique that forms a vacuum air channel inside a single piece of material without using adhesive.
There is no risk of contaminant, outgassing, or particles. ST.CERA’s vacuum End Effector / Handling Arm with special coating technology is electrical insulated. We can also provide ESD ceramic material that is electrical insulated without any coating.
Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃. -
Alumina Ceramic End Effector Semiconductor Equipment Components
Prevent the particles that can generate from the bevel or angled edges and the back surface while wafers are transported or being in contact with End Effector / Handling Arm.
For the guides, adopted a soft material that does not damage the wafer.
Thinning is possible with ST.CERA’s built-in vacuum channel technology that does not use adhesives.
Possible to make mounting holes and to change the length and width of the base where the End Effector / Handling Arm is mounted on the robot.
Mounting sensors, screws and brackets is available as an option.
Designed to be used in atmosphere.
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Customized CNC Machining of St.Cera Ceramic End Effector
ST.CERA offers a vacuum ceramic End Effector / Handling Arm with a built-in hollow channel. We specialize in a technique that forms a vacuum air channel inside a single piece of material without using adhesive.
There is no risk of contaminant, outgassing, or particles. ST.CERA’s vacuum End Effector / Handling Arm with built-in channel are durable and can be used at high temperatures. Moreover, our manufacturing cost can be reduced by eliminating unnecessary assembly.
Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, it could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃.
