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High-Purity Alumina Ceramic Plate – for Insulation & High-Temperature Fixtures

High-Purity Alumina Ceramic Plate – for Insulation & High-Temperature Fixtures

Short Description:

St.Cera’s ceramic plate is manufactured from 99.8% high-purity alumina (Al₂O₃), offering high dielectric strength (15×10⁶ V/m), thermal stability up to 1600°C, and excellent wear resistance. Plates are precision lapped to achieve flatness ≤5 μm over 100 mm and surface roughness Ra ≤0.4 μm. Available in standard thicknesses from 1 mm to 20 mm, custom sizes up to 500×500 mm. Used as electrical insulators, heater bases, chamber liners, and vacuum chuck substrates.


Product Detail

Product Tags

St.Cera’s ceramic plate is manufactured from 99.8% high-purity alumina (Al₂O₃), offering high dielectric strength (15×10⁶ V/m), thermal stability up to 1600°C, and excellent wear resistance. Plates are precision lapped to achieve flatness ≤5 μm over 100 mm and surface roughness Ra ≤0.4 μm. Available in standard thicknesses from 1 mm to 20 mm, custom sizes up to 500×500 mm. Used as electrical insulators, heater bases, chamber liners, and vacuum chuck substrates.

 

Specifications (based on 99.8% Al₂O₃):

Property Value
Material 99.8% Alumina (Ivory)
Density 3.93 g/cm³
Flexural Strength 361 MPa
Dielectric Strength 15×10⁶ V/m
Specific Resistance >10¹⁴ Ω·mm²/m
Thermal Conductivity 32 W/m·k
Thermal Expansion (25-1000°C) 7.2×10⁻⁶/℃
Max Operating Temp 1600°C
Flatness (per 100 mm) ≤5 μm
Thickness Tolerance ±0.05 mm
Surface Roughness Ra ≤0.4 μm

 

Applications:

  • · Electrical insulation plates in high-voltage equipment
  • · Heater support plates in diffusion furnaces
  • · Chamber liners for CVD/PVD
  • · Base plates for vacuum chucks

 

Advantages:

  • · 0% water absorption – no outgassing in vacuum
  • · Chemically inert – resistant to acids and halogens (except HF)

 

Customization:

Holes, cutouts, edge rounding, and metallization available.


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