Alumina Vacuum Chuck for Precision Dicing & Grinding
St.Cera’s alumina vacuum chuck is manufactured from 99.8% high-purity Al₂O₃ with precision-machined vacuum grooves. Our precision grinding capability achieves flatness of 0.003mm and parallelism of 0.002mm, ensuring warp-free wafer fixation during dicing, backside grinding, and inspection. The material offers high flexural strength (361 MPa), hardness (16 GPa), and thermal stability up to 800°C. Available in round formats up to 600mm outer diameter (OD) and rectangular shapes up to 1500mm length. Vacuum grooves are custom-designed (concentric, radial, or grid patterns) to suit specific process requirements. Each chuck is inspected with laser interferometer and supplied with a flatness verification report.
Specifications (based on 99.8% Al₂O₃ & St.Cera manufacturing capabilities):
| Property | Value |
| Material | 99.8% Alumina (Ivory) |
| Density | 3.93 g/cm³ |
| Flexural Strength | 361 MPa |
| Vickers Hardness | 16 GPa |
| Outer Diameter (max) | 600mm |
| Thickness (max) | 100mm |
| Length (max) | 1500mm |
| Flatness | 0.003mm |
| Parallelism | 0.002mm |
| Surface Finish | Ra0.1 |
| Max Operating Temp | 800°C |
Applications:
- · Wafer dicing and scribing (200mm/300mm and larger)
- · Backside grinding of thin wafers
- · Optical inspection and probing
- · Large substrate handling
Manufacturing Precision:
- · Straightness: 0.005mm
- · Perpendicularity: 0.005mm
- · Roundness: 0.002mm
- · Concentricity: 0.01mm
