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Mphete Yotetezera Alumina PVD ya Machitidwe Ochotsera Nthunzi Yathupi
Mphete ya St.Cera's PVD insulation imapangidwira kuchokera ku alumina ya 99.8% yoyera kwambiri (Al₂O₃) kuti igwiritsidwe ntchito mu makina osungira nthunzi (PVD). Mpheteyi imapereka kulekanitsidwa kwa magetsi pakati pa zigawo za chipinda, kuletsa kupindika kwa arc ndikuwonetsetsa kuti plasma ikugwira ntchito bwino. Zinthu zofunika kwambiri ndi monga mphamvu yayikulu ya dielectric (15×10⁶ V/m), kukana kwapadera >10¹⁴ Ω·mm²/m, ndi kukhazikika kwa kutentha mpaka 1600°C. Mphamvu zathu zolondola zogwirira ntchito zimafikira mainchesi akunja mpaka 600mm, mainchesi amkati mpaka 0.2mm, kusalala kwa 0.003mm, ndi kumaliza pamwamba pa Ra0.1. Kupanda ma porosity ndi kusakhalapo kwa mankhwala kwa mpheteyi kumatsimikizira kudalirika kwa nthawi yayitali m'malo ovuta.
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Zida za Alumina Ceramic za E-Gun Evaporation Systems
St.Cera imapanga zinthu za alumina ceramic zoyera kwambiri za 99.8% zomwe zimapangidwa makamaka kuti zigwiritsidwe ntchito potulutsa mpweya wa electron beam (E-gun). Zigawozi zikuphatikizapo zotchingira moto, zishango zoteteza mpweya, zotchingira moto, ndi zida zomangira. Zipangizozi zimapereka mphamvu ya dielectric yapamwamba (15×10⁶ V/m), kukhazikika kwa kutentha mpaka 1600°C, komanso kukana bwino kutentha ndi kuukira kwa mankhwala kuchokera ku zinthu zomwe zasungunuka. Mphamvu zathu zokonza molondola zimapangitsa kuti zikhale zovuta kwambiri ndi kukula kochepa kwa 0.2mm, kusalala kwa 0.003mm, ndi kutha kwa pamwamba pa Ra0.1. Gawo lililonse limayesedwa 100% CMM kuti liwone ngati ndi lolondola.
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Mbale Yaikulu ya Alumina Ceramic ya Semiconductor & Industrial Fixtures
St.Cera imapanga mbale zazikulu zadothi zopangidwa ndi alumina ya 99.8% yoyera bwino (Al₂O₃) yokhala ndi miyeso yokwanira mpaka 1500mm m'litali ndi 600mm m'lifupi. Mphamvu zathu zopukusira molondola zimapangitsa kuti zikhale zosalala mpaka 0.003mm kuposa 100mm ndi kufanana kwa 0.002mm, kuonetsetsa kuti pamwamba pake pamakhala bwino nthawi zonse. Kukhuthala mpaka 100mm, kutha kwa pamwamba mpaka Ra0.1. Ma mbale awa amagwira ntchito ngati maziko a vacuum chuck, ma heater platens, ma insulation panels amagetsi, ndi pansi pa chipinda chogwirira ntchito mu semiconductor, display, ndi photovoltaic manufactures. Pali mabowo odutsa, ma counterbores, ndi ma edge profiling.
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Mphete Yopangira Alumina Ceramic Yoyenera Kusindikiza, Kuteteza ndi Kukonza
Mphete ya ceramic ya St.Cera imapangidwa mwaluso kwambiri kuchokera ku alumina ya 99.8% yoyera bwino (Al₂O₃) kuti igwiritsidwe ntchito pofunikira kukana kuwononga kwambiri, kutchinjiriza magetsi, komanso kukhazikika kwa kutentha mpaka 1600°C. Mphamvu zathu zopangira zimathandiza mainchesi akunja mpaka 600mm, makulidwe mpaka 100mm, ndi mainchesi amkati ang'onoang'ono mpaka 0.2mm, okhala ndi kusalala kwa 0.003mm, kufanana kwa 0.002mm, ndi kukhazikika kwa 0.01mm. Imapezeka ngati mphete zosindikizira, mphete zolumikizira, mphete zosungira, kapena ma profiles apadera. Kupanda ma porosity ndi kusakhalapo kwa mankhwala kwa chinthucho kumapangitsa kuti chikhale choyenera malo ochitira mankhwala ndi plasma.
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Chubu cha Alumina Ceramic Choyera Kwambiri cha Malo Otentha Kwambiri & Owononga
Chubu cha ceramic cha St.Cera chimapangidwa kuchokera ku alumina ya 99.8% yoyera kwambiri (Al₂O₃), yomwe imapereka kukhazikika kwa kutentha mpaka 1600°C, mphamvu yayikulu ya dielectric (15×10⁶ V/m), komanso kukana mankhwala. Mphamvu zathu zolondola zogwirira ntchito zimathandiza kuti ma diameter amkati akhale ang'onoang'ono ngati 0.2mm, ma diameter akunja mpaka 600mm, ndi kutalika mpaka 1500mm, ndi kulunjika kwa 0.005mm, kukhazikika kwa 0.01mm, ndi kutha kwa pamwamba kwa Ra0.1. Chubucho sichimayamwa madzi (0% kuyamwa madzi) ndipo chimaletsa mpweya kutuluka m'malo otayira mpweya, zomwe zimapangitsa kuti chikhale choyenera kutenthetsa ma furniture a semiconductor, chitetezo cha thermocouple, ndi kukonza mankhwala. Makoma opangidwa mwamakonda ndi makonzedwe omaliza (athyathyathya, opindika, opindika) alipo.
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Zida Zapadera za Alumina Ceramic za Semiconductor & Industrial Equipment
St.Cera imapanga zida zadothi zopangidwa mwamakonda kuchokera ku alumina ya 99.8% yoyera kwambiri (Al₂O₃) malinga ndi zojambula za makasitomala. Malo athu ali ndi makina opukutira molondola komanso malo opangira makina a CNC, zomwe zimathandiza kupanga zida zovuta zadothi mwaluso kwambiri. Zida wamba zimaphatikizapo zotchingira, mipira yonyamula, mphete zosindikizira, ma bushing, zida zapadera, ndi ma geometri ovuta. Mphamvu zathu zopangira zimathandiza
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Mphuno ya Alumina Ceramic ya Jakisoni wa Gasi/Madzimadzi Otentha Kwambiri
Mphuno ya ceramic ya St.Cera imapangidwa molondola kuchokera ku alumina ya 99.8% yoyera kwambiri (Al₂O₃), yomwe imapereka kukana kwambiri kuvulala (Vickers 16 GPa), kusakhala ndi mphamvu ya mankhwala, komanso kukhazikika kwa kutentha mpaka 1600°C. Mphamvu zathu zogwirira ntchito molondola zimakhala ndi mainchesi amkati ang'onoang'ono ngati 0.2mm, ndi kulunjika kwa 0.005mm ndi kukhazikika kwa 0.01mm, kuonetsetsa kuti kuyenda bwino komanso kufalikira kwa madzi/gasi molondola. Mphunoyi ili ndi chibowo chamkati chosalala chokhala ndi Ra0.1 pamwamba, kuchepetsa kukana kuyenda ndikuchepetsa kutsekeka. Ma diameter a orifice kuyambira 0.2mm mpaka 5.0mm, ndi ma geometries apadera kuphatikiza ma outlet owongoka, opindika, kapena angapo. Mphuno iliyonse imayesedwa molingana ndi kukula kwake ndikuwunikidwa ngati ikugwirizana ndi kuyenda.
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Mbale Yopukutira ya Alumina Ceramic Yoyera Kwambiri Yopangira Kupaka Mwanzeru
Mbale yopukusira ya St.Cera imapangidwa kuchokera ku alumina ya 99.8% yoyera bwino (Al₂O₃) yogwiritsidwa ntchito popakira ndi kupukusira molondola. Mphamvu yathu yopukusira molondola imafikira kuphwanyika kwa 0.003mm, kufanana kwa 0.002mm, ndi kutha kwa pamwamba kwa Ra0.1, kuonetsetsa kuti zinthuzo zichotsedwa mofanana pamwamba pa mbale yonse. Mbaleyi imapereka kukana bwino kwambiri kuvala (Vickers 16 GPa), mphamvu yopindika kwambiri (361 MPa), komanso kukhazikika kwa kutentha mpaka 800°C. Imapezeka mu mawonekedwe ozungulira mpaka 600mm m'mimba mwake ndi mbale zozungulira mpaka 1500mm kutalika. Malo opindika (m'lifupi mwa m'mphepete 0.5–2.0mm) amapezeka kuti agawidwe mu njira zopakira. Mbale iliyonse imayesedwa ndi laser interferometer ndipo imaperekedwa ndi lipoti loyesa molondola.
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Chotsukira Kwambiri cha Alumina Ceramic Chothandiza pa Maloboti Ogwira Ntchito Zakuthwa
Chopangira cha alumina cha St.Cera's alumina ceramic end effector chimapangidwa molondola kuchokera ku 99.8% high-purity Al₂O₃ pogwiritsa ntchito zida zapamwamba za CNC 5-axis. Mphamvu zathu zopangira zimaphatikizapo makina opukutira molondola ndi malo opangira ma CNC, zomwe zimathandiza kuti ma geometries ovuta akhale olondola kwambiri. Chopangirachi chili ndi mawonekedwe opyapyala (oonda ngati 1.5 mm) okhala ndi m'mphepete wocheperako kuti chiyike wafer yosalala. Zipangizozi zimapereka kuuma kwakukulu (Young's modulus 380 GPa), kukana kuvala bwino, komanso kukhazikika kwa kutentha mpaka 800°C. Chigawo chilichonse chimapangidwa molondola kuti chikhale chosalala cha 0.003mm, kufanana kwa 0.002mm, ndi kutha kwa pamwamba kwa Ra0.1, kuonetsetsa kuti wafer imalumikizana bwino komanso kuti igwire ntchito popanda tinthu m'malo osungira ma semiconductor FAB. Imapezeka kutalika kuyambira 150 mm mpaka 450 mm, yokhala ndi ma geometries apadera (m'mphepete, Bernoulli, flat) ndi ma flanges oyika kuti agwirizane ndi ma robot a OEM. Zosankha zomaliza pamwamba zimaphatikizapo chophimba chopindika, chopukutidwa, kapena cha ESD dissipative (10⁶–10⁹Ω/sq).
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Alumina Vacuum Chuck Yopangira Kudula ndi Kupera Moyenera
Chotsukira cha alumina cha St.Cera chimapangidwa kuchokera ku 99.8% ya Al₂O₃ yoyera kwambiri yokhala ndi ma groove opangidwa mwaluso. Mphamvu yathu yopukusira molondola imafikira kuphwanyika kwa 0.003mm ndi kufanana kwa 0.002mm, kuonetsetsa kuti wafer imakhazikika popanda kupindika panthawi yodula, kupukuta kumbuyo, ndi kuyang'aniridwa. Zipangizozi zimapereka mphamvu yopindika kwambiri (361 MPa), kuuma (16 GPa), komanso kukhazikika kwa kutentha mpaka 800°C. Imapezeka mu mawonekedwe ozungulira mpaka 600mm external diameter (OD) ndi mawonekedwe amakona anayi mpaka kutalika kwa 1500mm. Ma groove opukusira amapangidwa mwapadera (concentric, radial, kapena grid patterns) kuti agwirizane ndi zofunikira zinazake. Chuck iliyonse imayesedwa ndi laser interferometer ndipo imaperekedwa ndi lipoti lotsimikizira kuphwanyika.
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Chotsukira cha SiC Chokhala ndi Porous Chokhala ndi Metal-Backed cha Kugwira Ntchito Yopindika & Yopyapyala
Chotsukira cha vacuum cha St.Cera chopangidwa ndi chitsulo chimaphatikiza wosanjikiza wa ceramic wa silicon carbide (SiC) wokhala ndi porous ndi maziko achitsulo opangidwa molondola (aluminiyamu kapena chitsulo chosapanga dzimbiri). Zinthu za SiC zokhala ndi porous (buluu-wakuda, porosity 35–40%, kukula kwa pore 20–30 μm, permeability 60 ml/cm²·min) zimapereka kugawa kwa vacuum kofanana komanso kofatsa pamwamba pa wafer yonse, kuchotsa chizindikiro cha m'mphepete ndikulola chithandizo chosakhudzana ndi ma wafer owonda (≤100 μm) kapena opotoka. Saizi ya SiC imapereka kukulitsa kutentha kochepa (3.5×10⁻⁶/℃), kukhazikika kwa kutentha mpaka 1000°C, komanso mphamvu yosinthasintha pang'ono (32–35 MPa). Maziko achitsulo amawonjezera kulimba kwa kapangidwe kake, kuyika mosavuta kudzera m'mabowo opindika, komanso chitetezo ku kusweka kwa brittle. Chuck iyi ndi yabwino kwambiri pogaya, kudula, komanso kukonza wafer kutentha kwambiri komwe vacuum yofanana ndi kutentha ndikofunikira kwambiri.
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Mbale ya Ceramic ya Alumina Yoyera Kwambiri - Yotetezera Kutentha Kwambiri & Zopangira Kutentha Kwambiri
Mbale ya ceramic ya St.Cera imapangidwa kuchokera ku alumina ya 99.8% yoyera kwambiri (Al₂O₃), yomwe imapereka mphamvu yayikulu ya dielectric (15×10⁶ V/m), kukhazikika kwa kutentha mpaka 1600°C, komanso kukana bwino kuvala. Ma mbale amalumikizidwa bwino kuti akhale osalala ≤5 μm kuposa 100 mm komanso kukhwima kwa pamwamba pa Ra ≤0.4 μm. Imapezeka mu makulidwe wamba kuyambira 1 mm mpaka 20 mm, kukula kopangidwa mwamakonda mpaka 500×500 mm. Imagwiritsidwa ntchito ngati zotetezera magetsi, maziko otenthetsera, ma chamber liners, ndi ma vacuum chuck substrates.
