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Madhisiki eAlumina Ceramic ane Kuchena Kwakanyanya
Zvigadzirwa nekupisa kunotonhora uye kunopiswa nekupisa kwakanyanya, zvobva zvagadzirwa nemachina chaiwo uye zvakapetwa, zvikamu zveceramic zvinogona kusangana nechero zvinodiwa zvemidziyo yesemiconductor ine hunhu hwayo hwekudzivirira kupera, kuramba ngura, kuwedzera kupisa kushoma, uye kuputira. Ceramics inogona kushanda mumhando dzakasiyana dzemidziyo yekugadzira semiconductor ine mamiriro ekupisa kwakanyanya, vacuum kana corrosive gas kwenguva yakareba.
Yakagadzirwa nehupfu hwealumina hwakachena kwazvo, hwakagadziriswa nekudzvanywa kwe isostatic inotonhora, kupisa kwakanyanya uye kupedzisa nemazvo, inogona kusvika pakukwanisa kwayo kusvika ±0.001 mm, kupedzisa pamusoro peRa 0.1, kuramba kupisa kusvika 1600℃.
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ruoko rwesimbi rwealumina
Zvigadzirwa nekupisa kunotonhora uye kunopiswa nekupisa kwakanyanya, zvobva zvagadzirwa nemachina chaiwo uye zvakapetwa, zvikamu zveceramic zvinogona kusangana nechero zvinodiwa zvemidziyo yesemiconductor ine hunhu hwayo hwekudzivirira kupera, kuramba ngura, kuwedzera kupisa kushoma, uye kuputira. Ceramics inogona kushanda mumhando dzakasiyana dzemidziyo yekugadzira semiconductor ine mamiriro ekupisa kwakanyanya, vacuum kana corrosive gas kwenguva yakareba.
Yakagadzirwa nehupfu hwealumina hwakachena kwazvo, hwakagadziriswa nekudzvanywa kwe isostatic inotonhora, kupisa kwakanyanya uye kupedzisa nemazvo, inogona kusvika pakukwanisa kwayo kusvika ±0.001 mm, kupedzisa pamusoro peRa 0.1, kuramba kupisa kusvika 1600℃.
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Mhete dzeCeramic Insulation Rings dzeCeramic Focusing Rings
Zvigadzirwa nekupisa kunotonhora uye kunopiswa nekupisa kwakanyanya, zvobva zvagadzirwa nemachina chaiwo uye zvakapetwa, zvikamu zveceramic zvinogona kusangana nechero zvinodiwa zvemidziyo yesemiconductor ine hunhu hwayo hwekudzivirira kupera, kuramba ngura, kuwedzera kupisa kushoma, uye kuputira. Ceramics inogona kushanda mumhando dzakasiyana dzemidziyo yekugadzira semiconductor ine mamiriro ekupisa kwakanyanya, vacuum kana corrosive gas kwenguva yakareba.
Yakagadzirwa nehupfu hwealumina hwakachena kwazvo, hwakagadziriswa nekudzvanywa kwe isostatic inotonhora, kupisa kwakanyanya uye kupedzisa nemazvo, inogona kusvika pakukwanisa kwayo kusvika ±0.001 mm, kupedzisa pamusoro peRa 0.1, kuramba kupisa kusvika 1600℃.
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Kudzivirirwa kweST.CERA Alumina Ceramic Clamp Ring Insulation
Zvigadzirwa nekupisa kunotonhora uye kunopiswa nekupisa kwakanyanya, zvobva zvagadzirwa nemachina chaiwo uye zvakapetwa, zvikamu zveceramic zvinogona kusangana nechero zvinodiwa zvemidziyo yesemiconductor ine hunhu hwayo hwekudzivirira kupera, kuramba ngura, kuwedzera kupisa kushoma, uye kuputira. Ceramics inogona kushanda mumhando dzakasiyana dzemidziyo yekugadzira semiconductor ine mamiriro ekupisa kwakanyanya, vacuum kana corrosive gas kwenguva yakareba.
Yakagadzirwa nehupfu hwealumina hwakachena kwazvo, hwakagadziriswa nekudzvanywa kwe isostatic inotonhora, kupisa kwakanyanya uye kupedzisa nemazvo, inogona kusvika pakukwanisa kwayo kusvika ±0.001 mm, kupedzisa pamusoro peRa 0.1, kuramba kupisa kusvika 1600℃.
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Ruoko rweRobhoti reAlumina Ceramic Rakacheneswa Kwazvo reKubata Wafer
Ruoko rwerobhoti rweSt.Cera rwealumina ceramic rwakagadzirwa nemazvo kubva pa99.8% Al₂O₃ (alumina) yakacheneswa zvakanyanya. Runosanganisa simba reflexural rakasiyana (361 MPa), kuomarara kwakanyanya (16 GPa), uye density yakaderera (3.93 g/cm³), zvichikonzera ruoko rwakareruka asi rwakasimba rwekutamisa wafer ye semiconductor. Kupisa kwekuwedzera kwechinhu (7.2×10⁻⁶/°C) kunoenderana nesilicon zvakanyanya, zvichideredza kusawirirana kwekupisa panguva yekugadzirisa.
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Zvikamu zveCeramic Ring zveAlumina High-Precision Ceramic
Zvigadzirwa nekupisa kunotonhora uye kunopiswa nekupisa kwakanyanya, zvobva zvagadzirwa nemachina chaiwo uye zvakapetwa, zvikamu zveceramic zvinogona kusangana nechero zvinodiwa zvemidziyo yesemiconductor ine hunhu hwayo hwekudzivirira kupera, kuramba ngura, kuwedzera kupisa kushoma, uye kuputira. Ceramics inogona kushanda mumhando dzakasiyana dzemidziyo yekugadzira semiconductor ine mamiriro ekupisa kwakanyanya, vacuum kana corrosive gas kwenguva yakareba.
Yakagadzirwa nehupfu hwealumina hwakachena kwazvo, hwakagadziriswa nekudzvanywa kwe isostatic inotonhora, kupisa kwakanyanya uye kupedzisa nemazvo, inogona kusvika pakukwanisa kwayo kusvika ±0.001 mm, kupedzisa pamusoro peRa 0.1, kuramba kupisa kusvika 1600℃.
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ST.CERA Zvishandiso zveSemiconductor zvakagadzirwa neCeramic Chucks
Zvigadzirwa nekupisa kunotonhora uye kunopiswa nekupisa kwakanyanya, zvobva zvagadzirwa nemachina chaiwo uye zvakapetwa, zvikamu zveceramic zvinogona kusangana nechero zvinodiwa zvemidziyo yesemiconductor ine hunhu hwayo hwekudzivirira kupera, kuramba ngura, kuwedzera kupisa kushoma, uye kuputira. Ceramics inogona kushanda mumhando dzakasiyana dzemidziyo yekugadzira semiconductor ine mamiriro ekupisa kwakanyanya, vacuum kana corrosive gas kwenguva yakareba.
Yakagadzirwa nehupfu hwealumina hwakachena kwazvo, hwakagadziriswa nekudzvanywa kwe isostatic inotonhora, kupisa kwakanyanya uye kupedzisa nemazvo, inogona kusvika pakukwanisa kwayo kusvika ±0.001 mm, kupedzisa pamusoro peRa 0.1, kuramba kupisa kusvika 1600℃.
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Silicon Carbide (SiC) Ceramic End Effector - Kusimba Kwakanyanya Kwekubata Wafer Pakupisa Kwakakwirira
St.Cera's SiC ceramic end effector inogadzirwa kubva kusilicon carbide ine purity yakakwira (SiC content 99.72%, free Si 0.05%) ichishandisa S1111 batch material. Inopa hunhu hwakanaka hwemakanika: flexural strength 449 MPa (yakayerwa), elastic modulus 457 GPa (yakayerwa), uye Vickers hardness 25–28 GPa (yakayerwa). Density yakaderera (3.10–3.15 g/cm³, yakayerwa) inopa kuomarara kwakanyanya, kwakanakira marobhoti ekufambisa wafer ane kumhanya kukuru. Nekupisa kwe120–150 W/m·K (yakayerwa) uye thermal expansion coefficient ye4.0–4.5×10⁻⁶/℃ (yakayerwa), end effector iyi inobvisa kupisa zvinobudirira uye inochengetedza kugadzikana kwedimensional panguva yekubata tembiricha yepamusoro (kusvika 1600–1700°C, hapana mutoro). Ruvara rutema/grey uye zero absorption yemvura zvinoita kuti cleanroom ienderane.
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Silicon Carbide (SiC) Yakavakirwa paVacuum Chuck yeNzvimbo Dzinopisa Nekupisa Kwakanyanya & Plasma
St.Cera's SiC-based ceramic chuck inogadzirwa kubva kusilicon carbide ine purity yakakwira (batch S1111, SiC 99.72%, free Si 0.05%). Inopa simba reflexural rakayerwa re449 MPa, kusimba kwe fracture kwe3.12 MPa·m¹/², uye elastic modulus ye457 GPa. Kupisa kwakajairika kwechinhu ichi (120–150 W/m·K) uye kuwedzera kwekupisa kwakaderera (4.0–4.5×10⁻⁶/℃) zvinogonesa kukurumidza kupisa uye wafer warpage shoma panguva yekupisa. Chuck inogona kugadzirwa sechuck ine porous vacuum (kuyerera kwegesi kwakaenzana) kana chuck yakagadzika. Nekupisa kwakanyanya kwekushandiswa kwe1600–1700°C (isina mutoro) uye kuramba kukuru kweplasma erosion, chuck iyi yakakodzera kugadzirisa wafer yekupisa kwakakwira (annealing, RTP) uye aggressive etch chambers uko alumina chucks inoora.
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Zvishandiso zveSemiconductor Ceramic Spare Parts Ceramic Carriers
Zvigadzirwa nekupisa kunotonhora uye kunopiswa nekupisa kwakanyanya, zvobva zvagadzirwa nemachina chaiwo uye zvakapetwa, zvikamu zveceramic zvinogona kusangana nechero zvinodiwa zvemidziyo yesemiconductor ine hunhu hwayo hwekudzivirira kupera, kuramba ngura, kuwedzera kupisa kushoma, uye kuputira. Ceramics inogona kushanda mumhando dzakasiyana dzemidziyo yekugadzira semiconductor ine mamiriro ekupisa kwakanyanya, vacuum kana corrosive gas kwenguva yakareba.
Yakagadzirwa nehupfu hwealumina hwakachena kwazvo, hwakagadziriswa nekudzvanywa kwe isostatic inotonhora, kupisa kwakanyanya uye kupedzisa nemazvo, inogona kusvika pakukwanisa kwayo kusvika ±0.001 mm, kupedzisa pamusoro peRa 0.1, kuramba kupisa kusvika 1600℃.
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Mhete yeAlumina Ceramic Inosungirirwa neSimbi Yekushandisa Zvishandiso Zvakasimba zveKurovera
Mhete yekukuya yeSt.Cera ine simbi inosanganisa alumina (99.8% Al₂O₃) yakacheneswa nesimbi ine simbi yakagadzirwa nemazvo (inowanzova aruminiyamu kana simbi isina ngura). Dhizaini iyi yehybrid inopa simba rekusakara uye kusagadzikana kwemakemikari kweceramic pamusoro pekukuya, nepo simbi ichiwedzera simba remuchina, nyore kuisa, uye kuramba kuputsika. Rutivi rwealumina runopa simba rekuchinjika re361 MPa, kuomarara kweVickers kwe16 GPa, uye kugadzikana kwekupisa kusvika ku800°C. Rutivi rwesimbi rwakagadzirwa nemaburi ekukwirisa, mapini ekutsvaga, kana hunhu hwemagineti hwekubatanidza mumichina yekukwiza, magrinder epuraneti, uye michina yeCMP.
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Zvikamu zveCeramic zveSemiconductor Probe Station Equipment
Zvigadzirwa nekupisa kunotonhora uye kunopiswa nekupisa kwakanyanya, zvobva zvagadzirwa nemachina chaiwo uye zvakapetwa, zvikamu zveceramic zvinogona kusangana nechero zvinodiwa zvemidziyo yesemiconductor ine hunhu hwayo hwekudzivirira kupera, kuramba ngura, kuwedzera kupisa kushoma, uye kuputira. Ceramics inogona kushanda mumhando dzakasiyana dzemidziyo yekugadzira semiconductor ine mamiriro ekupisa kwakanyanya, vacuum kana corrosive gas kwenguva yakareba.
Yakagadzirwa nehupfu hwealumina hwakachena kwazvo, hwakagadziriswa nekudzvanywa kwe isostatic inotonhora, kupisa kwakanyanya uye kupedzisa nemazvo, inogona kusvika pakukwanisa kwayo kusvika ±0.001 mm, kupedzisa pamusoro peRa 0.1, kuramba kupisa kusvika 1600℃.
