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Kugadziriswa Kwakagadzirwa kweAl2O3 Ceramic Wafer Chuck
Zvigadzirwa nekupisa kunotonhora uye kunopiswa nekupisa kwakanyanya, zvobva zvagadzirwa nemachina chaiwo uye zvakapetwa, zvikamu zveceramic zvinogona kusangana nechero zvinodiwa zvemidziyo yesemiconductor ine hunhu hwayo hwekudzivirira kupera, kuramba ngura, kuwedzera kupisa kushoma, uye kuputira. Ceramics inogona kushanda mumhando dzakasiyana dzemidziyo yekugadzira semiconductor ine mamiriro ekupisa kwakanyanya, vacuum kana corrosive gas kwenguva yakareba.
Yakagadzirwa nehupfu hwealumina hwakachena kwazvo, hwakagadziriswa nekudzvanywa kwe isostatic inotonhora, kupisa kwakanyanya uye kupedzisa nemazvo, inogona kusvika pakukwanisa kwayo kusvika ±0.001 mm, kupedzisa pamusoro peRa 0.1, kuramba kupisa kusvika 1600℃.
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ST.CERA Yakagadzirirwa Semiconductor Equipment Ceramic Plate
Zvigadzirwa nekupisa kunotonhora uye kunopiswa nekupisa kwakanyanya, zvobva zvagadzirwa nemachina chaiwo uye zvakapetwa, zvikamu zveceramic zvinogona kusangana nechero zvinodiwa zvemidziyo yesemiconductor ine hunhu hwayo hwekudzivirira kupera, kuramba ngura, kuwedzera kupisa kushoma, uye kuputira. Ceramics inogona kushanda mumhando dzakasiyana dzemidziyo yekugadzira semiconductor ine mamiriro ekupisa kwakanyanya, vacuum kana corrosive gas kwenguva yakareba.
Yakagadzirwa nehupfu hwealumina hwakachena kwazvo, hwakagadziriswa nekudzvanywa kwe isostatic inotonhora, kupisa kwakanyanya uye kupedzisa nemazvo, inogona kusvika pakukwanisa kwayo kusvika ±0.001 mm, kupedzisa pamusoro peRa 0.1, kuramba kupisa kusvika 1600℃.
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12-Inch Alumina Vacuum Chuck ye300mm Wafer Processing
Chigadziko chevacuum cleaner cheSt.Cera chine 12-inch chakagadzirwa nemazvo kubva pa99.8% high-purity alumina (Al₂O₃) kuti chishandiswe pakubata wafer ye300mm. Chigadziko chine nzvimbo yakatsetseka (groove width 0.5–1.0 mm, pitch 2–3 mm) kuti chive nechokwadi chekuti vacuum cleaner inopararira zvakaenzana mu300mm dhayamita yese. Kusatsetseka kunochengetwa mukati me5 μm, zvichiita kuti wafer isapinda panguva yekucheka, kukuya, uye kuongorora. Simba guru rekutenderera (361 MPa) uye kuomarara (16 GPa) zvinovimbisa kugadzikana kwenguva refu kunyangwe pasi pevacuum cycles dzinodzokororwa.
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Alumina Ceramic End Effector ine Integrated Vacuum Channels
St.Cera's alumina vacuum end effector inobatanidza nzira dzevacuum dzakagadzirwa nemachina nemaburi ekusveta zvakananga mumuviri wealumina we99.8% wakachena zvakanyanya. Dhizaini iyi inobvisa mapedhi ekunze evacuum, zvichiita kuti wafer ikwanise kutorwa zvakananga nesimba rakafanana rekubata. Simba guru re flexural rechinhu ichi (361 MPa) uye kuomarara (16 GPa) zvinovimbisa kugadzikana kwenguva refu pasi pevacuum cycles dzinodzokororwa. Kusatsetseka munzvimbo yepad kunochengetwa mukati me10 μm, zvichidzivirira wafer kushushikana uye kutyoka. Mapaipi evacuum ari paflange yekumashure kuti zvive nyore kubatanidza nemaoko erobhoti eOEM.
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Zvikamu zveESD-Safe Alumina Ceramic zveStatic-Sensitive Wafer Handling
Zvikamu zveSt.Cera's ESD (electrostatic discharge) safe alumina ceramic zvinogadzirwa kubva ku99.8% high-purity Al₂O₃ ine resistivity yakagadzirwa yepamusoro ye10⁶–10⁹ Ω/sq, inowanikwa kuburikidza nekushandisa doping kana coating process. Zvikamu izvi zvinobvisa simba re static, zvichidzivirira kukuvara kwe electrostatic kune sensitive semiconductor wafers nemidziyo. Chinhu chepasi chinochengetedza simba rayo re flexural (361 MPa), kuomarara (16 GPa), uye dielectric strength (15×10⁶ V/m). Zvikamu zve ceramic zvakachengeteka zveESD zvinosanganisira end effectors, lift pins, guide rails, uye custom fixtures yeFAB automation.
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Zvikamu zveCeramic zveSemiconductor Probe Equipment
Zvigadzirwa nekupisa kunotonhora uye kunopiswa nekupisa kwakanyanya, zvobva zvagadzirwa nemachina chaiwo uye zvakapetwa, zvikamu zveceramic zvinogona kusangana nechero zvinodiwa zvemidziyo yesemiconductor ine hunhu hwayo hwekudzivirira kupera, kuramba ngura, kuwedzera kupisa kushoma, uye kuputira. Ceramics inogona kushanda mumhando dzakasiyana dzemidziyo yekugadzira semiconductor ine mamiriro ekupisa kwakanyanya, vacuum kana corrosive gas kwenguva yakareba.
Yakagadzirwa nehupfu hwealumina hwakachena kwazvo, hwakagadziriswa nekudzvanywa kwe isostatic inotonhora, kupisa kwakanyanya uye kupedzisa nemazvo, inogona kusvika pakukwanisa kwayo kusvika ±0.001 mm, kupedzisa pamusoro peRa 0.1, kuramba kupisa kusvika 1600℃.
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Ceramic Plate Semiconductor Equipment Carrier
Zvigadzirwa nekupisa kunotonhora uye kunopiswa nekupisa kwakanyanya, zvobva zvagadzirwa nemachina chaiwo uye zvakapetwa, zvikamu zveceramic zvinogona kusangana nechero zvinodiwa zvemidziyo yesemiconductor ine hunhu hwayo hwekudzivirira kupera, kuramba ngura, kuwedzera kupisa kushoma, uye kuputira. Ceramics inogona kushanda mumhando dzakasiyana dzemidziyo yekugadzira semiconductor ine mamiriro ekupisa kwakanyanya, vacuum kana corrosive gas kwenguva yakareba.
Yakagadzirwa nehupfu hwealumina hwakachena kwazvo, hwakagadziriswa nekudzvanywa kwe isostatic inotonhora, kupisa kwakanyanya uye kupedzisa nemazvo, inogona kusvika pakukwanisa kwayo kusvika ±0.001 mm, kupedzisa pamusoro peRa 0.1, kuramba kupisa kusvika 1600℃.
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Zvishandiso zveSemiconductor Ceramic Spare Parts
Zvigadzirwa nekupisa kunotonhora uye kunopiswa nekupisa kwakanyanya, zvobva zvagadzirwa nemachina chaiwo uye zvakapetwa, zvikamu zveceramic zvinogona kusangana nechero zvinodiwa zvemidziyo yesemiconductor ine hunhu hwayo hwekudzivirira kupera, kuramba ngura, kuwedzera kupisa kushoma, uye kuputira. Ceramics inogona kushanda mumhando dzakasiyana dzemidziyo yekugadzira semiconductor ine mamiriro ekupisa kwakanyanya, vacuum kana corrosive gas kwenguva yakareba.
Yakagadzirwa nehupfu hwealumina hwakachena kwazvo, hwakagadziriswa nekudzvanywa kwe isostatic inotonhora, kupisa kwakanyanya uye kupedzisa nemazvo, inogona kusvika pakukwanisa kwayo kusvika ±0.001 mm, kupedzisa pamusoro peRa 0.1, kuramba kupisa kusvika 1600℃.
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Mhete yeSeal Alumina Ceramic Yakachena Kwazvo Yekuisirwa Kwemukamuri Yekupisa Kwakakwirira
Mhete yeSt.Cera's ceramic seal yakagadzirwa senzira yekuchinja maO-rings epolymer munzvimbo dzakanyanya uko elastomers dzinoora. Yakagadzirwa kubva ku99.8% high-purity alumina (Al₂O₃), iyi mhete yakasimba inoshandiswa mukushandiswa kwe static sealing - inowanzo batanidzwa ne soft metal kana graphite gasket - kupa vacuum yakavimbika kana gasi rekudzivirira patembiricha inosvika 800°C uye munzvimbo dzine plasma kana makemikari akasimba. Chinhu ichi hachibudisi mweya, simba rekumanikidza rakawanda (simba re flexural 361 MPa), uye kusagadzikana kwemakemikari (kunodzivirira ma halogen, acids, uye alkalis kunze kweHF). Nzvimbo dzekuvhara dzakanyatsorongeka (flatness ≤5 μm, surface roughness Ra ≤0.2 μm) dzinoita kuti pave nekusangana kwakasimba kwesimbi kana ceramic components.
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Mhete yeAlumina Chamber Focus Ring yePlasma Etch & CVD Systems
Mhete yeSt.Cera's chamber focus chinhu chakakosha chinoshandiswa mumidziyo yeplasma etch, CVD, uye PVD semiconductor. Yakagadzirwa kubva ku99.8% high-purity alumina (Al₂O₃), mhete iyi inotenderedza mupendero wewafer kuti ivhare plasma uye iwedzere kugoverwa kweion angular, nokudaro ichivandudza kufanana kwe etch pamusoro pewafer. Chinhu ichi chinopa resistance yeplasma inoshamisa, simba re dielectric rakawanda (15×10⁶ V/m), uye kugadzikana kwekupisa kusvika ku1600°C, zvichiita kuti ive yakavimbika kwenguva refu munzvimbo dzeplasma dzine fluorine- kana chlorine. Precision-ground ID/OD uye flatness (≤10 μm) zvinogonesa nzvimbo chaiyo yewafer edge, kuderedza zvikanganiso zvemupendero uye kugadzirwa kwezvikamu.
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Mhete yeAlumina Ceramic Yakachena Kwazvo yeCVD / PVD Process Chambers
Mhete yeSt.Cera yakagadzirwa zvakananga kuti ishandiswe mumakamuri ekugadzirisa eCVD (Chemical Vapor Deposition) uye PVD (Physical Vapor Deposition). Yakagadzirwa kubva ku99.8% high-purity alumina (Al₂O₃), mhete iyi inoshanda sechikamu chekamuri, ring yekutarisa, kana chikamu che process kit chekuvhara plasma nekudzivirira madziro ekamuri kubva mukukukurwa. Chinhu ichi chinopa resistance yakanaka yeplasma, simba re dielectric rakawanda (15×10⁶ V/m), uye kugadzikana kwekupisa kusvika 1600°C, zvichiita kuti ive nehupenyu hurefu munzvimbo dzeplasma dzine fluorine. Kushivirira kwakaringana (±0.05 mm paID/OD) uye flatness (≤10 μm) zvinogonesa kugadzika kwewafer edge nguva dzose, kuvandudza kufanana kwekuisa uye kuderedza kugadzirwa kwezvikamu.
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Bernoulli Ceramic End Effector — Kubata Wafer Isina Kubata MaWafer Akatetepa Uye Asina Kusimba
St.Cera's Bernoulli ceramic end effector inoshandisa aerodynamic lift kubata mawafers pasina kubata muviri. Yakagadzirwa kubva ku99.8% alumina (Al₂O₃) kana silicon carbide (SiC), ine ma nozzles akagadzirwa nemazvo anoburitsa gasi rakamanikidzwa kuti rigadzire firimu remhepo rakatetepa pakati pe effector newafer. Iyi nheyo yekusabata inobvisa kusvibiswa kwemashure, kupwanyika kwemucheto, uye kukuvara kwenzvimbo, zvichiita kuti ive yakakodzera mawafers matete (≤100 μm), asina kusimba, kana akakombama. Iyo ceramic substrate inopa simba rakasimba reflexural (361 MPa yeAl₂O₃; kusvika 550–600 MPa yeSiC), huremu hwakaderera, uye kugadzikana kwakanaka, zvichiita kuti ive nechokwadi chekuti inogona kudzokororwa munzvimbo dzinoshandiswa mawafers ekumhanya kwepamusoro.
