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Kukonza Koyenera kwa Al2O3 Ceramic Wafer Chuck
Zopangidwa ndi kukanikiza kozizira kwa isostatic ndikuzimitsidwa ndi kutentha kwambiri, kenako nkupangidwa ndi makina opangidwa bwino ndikupukutidwa, zida zosinthira za ceramic zimatha kukwaniritsa zofunikira zilizonse za zida za semiconductor ndi mawonekedwe ake monga kukana kuwonongeka, kukana dzimbiri, kukulitsa kutentha pang'ono, komanso kutchinjiriza. Zida za ceramic zimatha kugwira ntchito mumitundu yosiyanasiyana ya zida zopangira semiconductor zokhala ndi kutentha kwambiri, vacuum kapena mpweya wowononga kwa nthawi yayitali.
Yopangidwa ndi ufa wa alumina woyeretsedwa kwambiri, wokonzedwa ndi kukanikiza kozizira kwa isostatic, kutentha kwambiri komanso kutsirizitsa molondola, imatha kufika pamlingo wololera mpaka ± 0.001 mm, pamwamba pake Ra 0.1, kukana kutentha 1600℃.
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ST.CERA Yopangidwa ndi Semiconductor Zida Zapadera Ceramic Plate
Zopangidwa ndi kukanikiza kozizira kwa isostatic ndikuzimitsidwa ndi kutentha kwambiri, kenako nkupangidwa ndi makina opangidwa bwino ndikupukutidwa, zida zosinthira za ceramic zimatha kukwaniritsa zofunikira zilizonse za zida za semiconductor ndi mawonekedwe ake monga kukana kuwonongeka, kukana dzimbiri, kukulitsa kutentha pang'ono, komanso kutchinjiriza. Zida za ceramic zimatha kugwira ntchito mumitundu yosiyanasiyana ya zida zopangira semiconductor zokhala ndi kutentha kwambiri, vacuum kapena mpweya wowononga kwa nthawi yayitali.
Yopangidwa ndi ufa wa alumina woyeretsedwa kwambiri, wokonzedwa ndi kukanikiza kozizira kwa isostatic, kutentha kwambiri komanso kutsirizitsa molondola, imatha kufika pamlingo wololera mpaka ± 0.001 mm, pamwamba pake Ra 0.1, kukana kutentha 1600℃.
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Chotsukira cha Alumina cha mainchesi 12 cha 300mm Wafer Processing
Chikwama cha vacuum cha St.Cera cha mainchesi 12 chimapangidwa bwino kwambiri kuchokera ku alumina ya 99.8% yoyera bwino (Al₂O₃) kuti chigwiritsidwe ntchito ndi wafer wa 300mm. Chikwamacho chili ndi malo opindika bwino (m'lifupi mwa groove 0.5–1.0 mm, pitch 2–3 mm) kuti chitsimikizire kufalikira kwa vacuum mofanana m'mimba mwake wonse wa 300mm. Kusalala kumakhala mkati mwa 5 μm, zomwe zimathandiza kuti wafer ikhale yolimba popanda kupindika panthawi yocheka, kupukuta kumbuyo, ndi kuyang'aniridwa. Mphamvu yayikulu yopindika (361 MPa) ndi kuuma (16 GPa) kwa chinthucho zimatsimikizira kukhazikika kwa nthawi yayitali ngakhale pansi pa vacuum cycles mobwerezabwereza.
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Alumina Ceramic End Effector yokhala ndi Ma Integrated Vacuum Channels
Chotsukira cha alumina cha St.Cera chimaphatikiza njira zotsukira zokonzedwa bwino komanso mabowo okokera mwachindunji m'thupi la alumina loyera kwambiri la 99.8%. Kapangidwe kameneka kamachotsa ma vacuum pads akunja, zomwe zimathandiza kuti wafer itengeke mwachindunji ndi mphamvu yogwirira ntchito yofanana. Mphamvu yopindika kwambiri ya chinthucho (361 MPa) ndi kuuma kwake (16 GPa) zimatsimikizira kukhazikika kwa nthawi yayitali pansi pa vacuum cycles mobwerezabwereza. Kusalala kudutsa pa pad kumasungidwa mkati mwa 10 μm, kupewa kupsinjika kwa wafer ndi kusweka. Madoko otsukira ali kumbuyo kwa flange kuti agwirizane mosavuta ndi manja a loboti la OEM.
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Zida za ESD-Safe Alumina Ceramic Zothandizira Kusamalira Wafer Mosasinthasintha
Ziwalo za St.Cera's ESD (electrostatic discharge) safe alumina ceramic zimapangidwa kuchokera ku 99.8% high-purity Al₂O₃ yokhala ndi resistivity yapamwamba ya 10⁶–10⁹ Ω/sq, yomwe imapezeka kudzera mu njira yopangira doping kapena coating. Ziwalozi zimachotsa bwino mphamvu yokhazikika, kuteteza kuwonongeka kwa magetsi ku ma wafers ndi zida zina za semiconductor. Chipangizo choyambira chimasunga mphamvu yake yopindika (361 MPa), kuuma (16 GPa), ndi mphamvu ya dielectric (15×10⁶ V/m). Ziwalo za ceramic zotetezeka za ESD zimaphatikizapo ma end effectors, ma lift pini, ma guide rails, ndi zida zapadera za FAB automation.
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Zida Zopangira Ceramic za Zida Zofufuzira za Semiconductor
Zopangidwa ndi kukanikiza kozizira kwa isostatic ndikuzimitsidwa ndi kutentha kwambiri, kenako nkupangidwa ndi makina opangidwa bwino ndikupukutidwa, zida zosinthira za ceramic zimatha kukwaniritsa zofunikira zilizonse za zida za semiconductor ndi mawonekedwe ake monga kukana kuwonongeka, kukana dzimbiri, kukulitsa kutentha pang'ono, komanso kutchinjiriza. Zida za ceramic zimatha kugwira ntchito mumitundu yosiyanasiyana ya zida zopangira semiconductor zokhala ndi kutentha kwambiri, vacuum kapena mpweya wowononga kwa nthawi yayitali.
Yopangidwa ndi ufa wa alumina woyeretsedwa kwambiri, wokonzedwa ndi kukanikiza kozizira kwa isostatic, kutentha kwambiri komanso kutsirizitsa molondola, imatha kufika pamlingo wololera mpaka ± 0.001 mm, pamwamba pake Ra 0.1, kukana kutentha 1600℃.
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Chonyamulira Zida za Ceramic Plate Semiconductor
Zopangidwa ndi kukanikiza kozizira kwa isostatic ndikuzimitsidwa ndi kutentha kwambiri, kenako nkupangidwa ndi makina opangidwa bwino ndikupukutidwa, zida zosinthira za ceramic zimatha kukwaniritsa zofunikira zilizonse za zida za semiconductor ndi mawonekedwe ake monga kukana kuwonongeka, kukana dzimbiri, kukulitsa kutentha pang'ono, komanso kutchinjiriza. Zida za ceramic zimatha kugwira ntchito mumitundu yosiyanasiyana ya zida zopangira semiconductor zokhala ndi kutentha kwambiri, vacuum kapena mpweya wowononga kwa nthawi yayitali.
Yopangidwa ndi ufa wa alumina woyeretsedwa kwambiri, wokonzedwa ndi kukanikiza kozizira kwa isostatic, kutentha kwambiri komanso kutsirizitsa molondola, imatha kufika pamlingo wololera mpaka ± 0.001 mm, pamwamba pake Ra 0.1, kukana kutentha 1600℃.
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Zida za Semiconductor Zida Zosinthira za Ceramic
Zopangidwa ndi kukanikiza kozizira kwa isostatic ndikuzimitsidwa ndi kutentha kwambiri, kenako nkupangidwa ndi makina opangidwa bwino ndikupukutidwa, zida zosinthira za ceramic zimatha kukwaniritsa zofunikira zilizonse za zida za semiconductor ndi mawonekedwe ake monga kukana kuwonongeka, kukana dzimbiri, kukulitsa kutentha pang'ono, komanso kutchinjiriza. Zida za ceramic zimatha kugwira ntchito mumitundu yosiyanasiyana ya zida zopangira semiconductor zokhala ndi kutentha kwambiri, vacuum kapena mpweya wowononga kwa nthawi yayitali.
Yopangidwa ndi ufa wa alumina woyeretsedwa kwambiri, wokonzedwa ndi kukanikiza kozizira kwa isostatic, kutentha kwambiri komanso kutsirizitsa molondola, imatha kufika pamlingo wololera mpaka ± 0.001 mm, pamwamba pake Ra 0.1, kukana kutentha 1600℃.
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Mphete Yosindikizira ya Alumina Ceramic Yoyera Kwambiri Yoyera Kwambiri Yotetezera Chisindikizo cha Chipinda Chotentha Kwambiri
Mphete yosindikizira ya ceramic ya St.Cera idapangidwa ngati njira ina m'malo mwa mphete za polymer O m'malo ovuta kwambiri komwe ma elastomer amawonongeka. Yopangidwa kuchokera ku 99.8% alumina yoyera kwambiri (Al₂O₃), mphete yosindikizira yolimba iyi imagwiritsidwa ntchito potseka mosasunthika - nthawi zambiri imagwirizanitsidwa ndi gasket yofewa yachitsulo kapena graphite - kuti ipereke vacuum yodalirika kapena yosunga mpweya pa kutentha mpaka 800°C komanso m'malo amphamvu a plasma kapena mankhwala. Zipangizozi sizimachotsa mpweya, mphamvu yayikulu yokakamiza (mphamvu yozungulira ya 361 MPa), komanso kusakhala ndi mpweya (yolimbana ndi ma halogen, ma acid, ndi alkali kupatula HF). Malo otsekera opangidwa bwino (flatness ≤5 μm, surface roughness Ra ≤0.2 μm) amatsimikizira kukhudzana kolimba ndi zitsulo kapena zida za ceramic.
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Mphete Yoyang'ana Chamber ya Alumina Yoyera Kwambiri ya Plasma Etch & CVD Systems
Mphete yoyang'ana chipinda cha St.Cera ndi gawo lofunikira kwambiri la zida zogwiritsira ntchito mu zida za semiconductor za plasma etch, CVD, ndi PVD. Yopangidwa kuchokera ku 99.8% alumina yoyera kwambiri (Al₂O₃), mpheteyo imazungulira m'mphepete mwa wafer kuti isunge plasma ndikuwonjezera kugawa kwa ion angular, motero imawongolera kufanana kwa etch pamwamba pa wafer. Zipangizozi zimapereka kukana kwapadera kwa plasma, mphamvu yayikulu ya dielectric (15×10⁶ V/m), komanso kukhazikika kwa kutentha mpaka 1600°C, kuonetsetsa kuti kudalirika kwa nthawi yayitali kumakhala kodalirika m'malo a plasma okhala ndi fluorine kapena chlorine. ID/OD yolondola komanso kusalala (≤10 μm) zimathandiza kuti m'mphepete mwa wafer muyike bwino, kuchepetsa zolakwika m'mphepete komanso kupanga tinthu tating'onoting'ono.
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Mphete ya Alumina Ceramic Yoyera Kwambiri ya Zipinda za CVD / PVD Process
Mphete ya ceramic ya St.Cera idapangidwa mwapadera kuti igwiritsidwe ntchito m'zipinda zoyendetsera za CVD (Chemical Vapor Deposition) ndi PVD (Physical Vapor Deposition). Yopangidwa kuchokera ku 99.8% alumina yoyera kwambiri (Al₂O₃), mphete iyi imagwira ntchito ngati choyika cha chipinda, mphete yolunjika, kapena gawo la process kit kuti isunge plasma ndikuteteza makoma a chipinda kuti asakokoloke. Zipangizozi zimapereka kukana kwabwino kwa plasma, mphamvu yayikulu ya dielectric (15×10⁶ V/m), komanso kukhazikika kwa kutentha mpaka 1600°C, kuonetsetsa kuti nthawi yayitali ikugwira ntchito m'malo okhala ndi fluorine. Kulekerera koyenera (±0.05 mm pa ID/OD) ndi kusalala (≤10 μm) zimathandiza kuti m'mphepete mwa wafer muzikhala bwino, kusintha kufanana kwa malo ndi kuchepetsa kupanga tinthu.
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Bernoulli Ceramic End Effector — Kugwira Ntchito Yosakhudzana ndi Wafer kwa Wafer Woonda ndi Wofooka
Chotsukira cha St.Cera's Bernoulli ceramic end effector chimagwiritsa ntchito aerodynamic lift kuti chigwire ma wafers popanda kukhudza thupi. Chopangidwa kuchokera ku alumina ya 99.8% yoyera kwambiri (Al₂O₃) kapena silicon carbide (SiC), chili ndi ma nozzles opangidwa bwino omwe amatulutsa mpweya wopanikizika kuti apange filimu yopyapyala pakati pa chotsukira ndi wafer. Mfundo yosakhudza iyi imachotsa kuipitsidwa kumbuyo, kusweka kwa m'mphepete, ndi kuwonongeka kwa pamwamba, zomwe zimapangitsa kuti ikhale yoyenera ma wafers owonda (≤100 μm), ofooka, kapena opotoka. Chotsukira cha ceramic chimapereka mphamvu yolimba kwambiri (361 MPa ya Al₂O₃; mpaka 550–600 MPa ya SiC), kulemera kochepa, komanso kukhazikika kwabwino kwambiri, kuonetsetsa kuti malo obwerezabwereza amayikidwa m'malo osungira ma wafers othamanga kwambiri.
