Silicon Carbide (SiC) Ceramic End Effector – High Stiffness for High-Temperature Wafer Handling
St.Cera’s SiC ceramic end effector is manufactured from high-purity silicon carbide (SiC content 99.72%, free Si 0.05%) using the S1111 batch material. It offers exceptional mechanical properties: flexural strength 449 MPa (measured), elastic modulus 457 GPa (measured), and Vickers hardness 25–28 GPa (typical). The low density (3.10–3.15 g/cm³, typical) provides a high specific stiffness, ideal for high-speed wafer transfer robots. With thermal conductivity of 120–150 W/m·K (typical) and thermal expansion coefficient of 4.0–4.5×10⁻⁶/℃ (typical), this end effector effectively dissipates heat and maintains dimensional stability during high-temperature handling (up to 1600–1700°C, no load). The black/gray color and zero water absorption ensure cleanroom compatibility.
Specifications (based on supplied SiC S1111 test report & typical values):
| Property | Value |
| Material | SiC (99.72% SiC, 0.05% Free Si) |
| Color | Black/Gray |
| Density | 3.10–3.15 g/cm³ |
| Water Absorption | 0% |
| Flexural Strength | 449 MPa (average) |
| Fracture Toughness | 3.12 MPa·m¹/² (average) |
| Elastic Modulus | 457 GPa |
| Vickers Hardness | 25–28 GPa |
| Thermal Conductivity (25°C) | 120–150 W/m·K |
| CTE (25–1000°C) | 4.0–4.5×10⁻⁶/℃ |
| Max Use Temp (no load) | 1600–1700°C |
Applications:
● High-temperature wafer handling (post-anneal, RTP, epitaxy)
● Plasma etch chambers requiring high erosion resistance
● High-speed transfer robots (lightweight, high stiffness)
Manufacturing:
SiC powder sintering → precision CNC grinding of arm profile and mounting features → surface lapping → ultrasonic cleaning. 100% dimensional inspection and helium leak test for vacuum applications.
Quality Control:
● CMM inspection of length, width, and flatness
● Flexural strength test per batch (per test report standard)
● Visual inspection under microscope for surface defects
Advantages over Alumina or Metal:
● 2× higher elastic modulus (457 vs ~380 GPa for alumina) – less deflection
● 3× higher thermal conductivity – faster heat dissipation
● Withstands >1600°C vs alumina’s 800°C in air
● Lower density than steel – 40% weight reduction
Customization:
Lengths 150–450 mm, tip shapes (edge grip, Bernoulli, flat), mounting flange patterns per OEM drawing.
*All mechanical data above comes from the supplied test report (batch S1111). Thermal and hardness values are typical for this SiC grade; please contact us for lot-specific certification.*
