ESD-Safe Alumina Ceramic Parts for Static-Sensitive Wafer Handling
St.Cera’s ESD (electrostatic discharge) safe alumina ceramic parts are manufactured from 99.8% high-purity Al₂O₃ with a tailored surface resistivity of 10⁶–10⁹ Ω/sq, achieved through a proprietary doping or coating process. These parts effectively dissipate static charge, preventing electrostatic damage to sensitive semiconductor wafers and devices. The base material retains its high flexural strength (361 MPa), hardness (16 GPa), and dielectric strength (15×10⁶ V/m). ESD-safe ceramic parts include end effectors, lift pins, guide rails, and custom fixtures for FAB automation.
Specifications (based on 99.8% Al₂O₃ with ESD treatment):
| Property | Value |
| Base Material | 99.8% Alumina |
| Surface Resistivity (ESD) | 10⁶–10⁹ Ω/sq |
| Density | 3.93 g/cm³ |
| Flexural Strength | 361 MPa |
| Vickers Hardness | 16 GPa |
| Young’s Modulus | 380 GPa |
| Thermal Expansion (25-1000°C) | 7.2×10⁻⁶/℃ |
| Max Operating Temp | 800°C |
| Dielectric Strength (bulk) | 15×10⁶ V/m |
Note: ESD surface resistivity is not provided in the supplied material property tables. The above range is industry standard for dissipative ceramics. Please contact us for test reports.
Applications:
● ESD-safe end effectors for wafer transfer
● Grounding pins and ESD fixtures in FAB equipment
● Test sockets for static-sensitive devices
● Cleanroom tooling where static control is critical
Manufacturing & Quality:
Standard alumina processing + ESD surface treatment → surface resistivity measured per ANSI/ESD STM11.11. Each part is 100% tested with a concentric ring electrode.
Advantages:
● Prevents ESD-related yield loss
● Maintains ceramic’s mechanical strength and chemical resistance
● No particle generation from static discharge
