High-Purity Alumina Ceramic Robot Arm for Wafer Handling
St.Cera’s alumina ceramic robot arm is precision-engineered from 99.8% high-purity Al₂O₃ (alumina). It combines exceptional flexural strength (361 MPa), high hardness (16 GPa), and low density (3.93 g/cm³), resulting in a lightweight yet rigid arm for semiconductor wafer transfer. The material’s thermal expansion coefficient (7.2×10⁻⁶/°C) matches silicon closely, minimizing thermal mismatch during processing.
Specifications (based on 99.8% Al₂O₃):
| Property | Value |
| Color | Ivory |
| Density | 3.93 g/cm³ |
| Flexural Strength | 361 MPa |
| Vickers Hardness | 16 GPa |
| Young’s Modulus | 380 GPa |
| Thermal Conductivity | 32 W/m·k |
| Thermal Expansion | 7.2×10⁻⁶/℃ |
| Dielectric Strength | 15×10⁶ V/m |
Applications:
- Vacuum wafer transfer robots (200mm/300mm)
- Atmospheric handling systems
- End effector arms for FAB automation
Manufacturing Process:
Isostatic pressing → green machining → sintering at 1600°C → CNC precision grinding → ultrasonic cleaning → Class 100 cleanroom packaging. Each arm is 100% inspected by CMM for flatness (±0.01 mm) and surface roughness (Ra ≤0.4 μm).
Quality Control:
St.Cera is ISO 9001:2015 certified. We perform dye penetrant testing for micro-cracks, three-point bending for flexural strength, and dielectric strength test per ASTM D149.
Advantages over Metal Arms:
- 50% lighter than stainless steel
- No galvanic corrosion
- Lower particle generation (≤0.05 particles/cm²)
- ESD-safe coating available (10⁶–10⁹ Ω/sq)
Customization:
Lengths from 150mm to 450mm, tip shapes (edge grip, Bernoulli, vacuum), and mounting flange patterns per OEM drawings. Prototypes in 2 weeks.
For bulk orders, please request a quotation.
